[HTML][HTML] MEMS-based energy harvesting devices for low-power applications–a review

MI Hossain, MS Zahid, MA Chowdhury… - Results in …, 2023 - Elsevier
Recently, there have been notable advancements in energy harvesting from various
sources, including mechanical vibrations, thermal gradients, and electromagnetic and solar …

[HTML][HTML] Recent development and futuristic applications of MEMS based piezoelectric microphones

A Kumar, A Varghese, A Sharma, M Prasad… - Sensors and Actuators A …, 2022 - Elsevier
This paper presents a comprehensive literature survey of MEMS based piezoelectric
microphones along with the fabrication processes involved, application domains, and …

Advances in microsensors and wearable bioelectronics for digital stethoscopes in health monitoring and disease diagnosis

SH Lee, YS Kim, WH Yeo - Advanced healthcare materials, 2021 - Wiley Online Library
Acoustic stethoscopes have demonstrated beneficial factors aiding diagnosis from the
doctors with accurate body sounds. Still, the conventional acoustic stethoscopes require a …

Design approaches of MEMS microphones for enhanced performance

MA Shah, IA Shah, DG Lee, S Hur - Journal of sensors, 2019 - Wiley Online Library
This paper reports a review about microelectromechanical system (MEMS) microphones.
The focus of this review is to identify the issues in MEMS microphone designs and …

MEMS-based piezoresistive and capacitive microphones: A review on materials and methods

A Kumar, A Varghese, D Kalra, A Raunak… - Materials Science in …, 2024 - Elsevier
Microelectromechanical systems (MEMS)-based piezoresistive and capacitive microphones
have gained significant attention due to their miniaturization, high performance, and diverse …

Performance and stress analysis of metal oxide films for CMOS-integrated gas sensors

L Filipovic, S Selberherr - Sensors, 2015 - mdpi.com
The integration of gas sensor components into smart phones, tablets and wrist watches will
revolutionize the environmental health and safety industry by providing individuals the ability …

Review on pressure sensors for structural health monitoring

S Sikarwar, Satyendra, S Singh, BC Yadav - Photonic Sensors, 2017 - Springer
This paper reports the state of art in a variety of pressure and the detailed study of various
matrix based pressure sensors. The performances of the bridges, buildings, etc. are …

Overview of advanced micro-nano manufacturing technologies for triboelectric nanogenerators

X Huang, Y Qi, T Bu, X Li, G Liu, J Zeng, B Fan… - Nanoenergy …, 2022 - mdpi.com
In the era of the Internet of Things, various electronics play an important role in information
interaction, in which the power supply is an urgent problem to be solved. Triboelectric …

Modeling and simulation of novel semiconducting metal oxide gas sensors for wearable devices

A Lahlalia, L Filipovic, S Selberherr - IEEE Sensors Journal, 2018 - ieeexplore.ieee.org
Our work focuses on the design and rigorous evaluation of two novel designs for
semiconducting metal oxide (SMO) gas sensors with different shapes and sizes, in order to …

Development of MEMS acoustic sensor with microtunnel for high SPL measurement

M Prasad, VK Khanna - IEEE Transactions on Industrial …, 2021 - ieeexplore.ieee.org
The fabrication of piezoelectric ZnO-based micro-electro-mechanical systems (MEMS)
acoustic sensor has been reported. The sensor structure consists of a piezoelectric ZnO film …