[HTML][HTML] MEMS-based energy harvesting devices for low-power applications–a review
Recently, there have been notable advancements in energy harvesting from various
sources, including mechanical vibrations, thermal gradients, and electromagnetic and solar …
sources, including mechanical vibrations, thermal gradients, and electromagnetic and solar …
[HTML][HTML] Recent development and futuristic applications of MEMS based piezoelectric microphones
This paper presents a comprehensive literature survey of MEMS based piezoelectric
microphones along with the fabrication processes involved, application domains, and …
microphones along with the fabrication processes involved, application domains, and …
Advances in microsensors and wearable bioelectronics for digital stethoscopes in health monitoring and disease diagnosis
Acoustic stethoscopes have demonstrated beneficial factors aiding diagnosis from the
doctors with accurate body sounds. Still, the conventional acoustic stethoscopes require a …
doctors with accurate body sounds. Still, the conventional acoustic stethoscopes require a …
Design approaches of MEMS microphones for enhanced performance
This paper reports a review about microelectromechanical system (MEMS) microphones.
The focus of this review is to identify the issues in MEMS microphone designs and …
The focus of this review is to identify the issues in MEMS microphone designs and …
MEMS-based piezoresistive and capacitive microphones: A review on materials and methods
Microelectromechanical systems (MEMS)-based piezoresistive and capacitive microphones
have gained significant attention due to their miniaturization, high performance, and diverse …
have gained significant attention due to their miniaturization, high performance, and diverse …
Performance and stress analysis of metal oxide films for CMOS-integrated gas sensors
L Filipovic, S Selberherr - Sensors, 2015 - mdpi.com
The integration of gas sensor components into smart phones, tablets and wrist watches will
revolutionize the environmental health and safety industry by providing individuals the ability …
revolutionize the environmental health and safety industry by providing individuals the ability …
Review on pressure sensors for structural health monitoring
This paper reports the state of art in a variety of pressure and the detailed study of various
matrix based pressure sensors. The performances of the bridges, buildings, etc. are …
matrix based pressure sensors. The performances of the bridges, buildings, etc. are …
Overview of advanced micro-nano manufacturing technologies for triboelectric nanogenerators
In the era of the Internet of Things, various electronics play an important role in information
interaction, in which the power supply is an urgent problem to be solved. Triboelectric …
interaction, in which the power supply is an urgent problem to be solved. Triboelectric …
Modeling and simulation of novel semiconducting metal oxide gas sensors for wearable devices
A Lahlalia, L Filipovic, S Selberherr - IEEE Sensors Journal, 2018 - ieeexplore.ieee.org
Our work focuses on the design and rigorous evaluation of two novel designs for
semiconducting metal oxide (SMO) gas sensors with different shapes and sizes, in order to …
semiconducting metal oxide (SMO) gas sensors with different shapes and sizes, in order to …
Development of MEMS acoustic sensor with microtunnel for high SPL measurement
The fabrication of piezoelectric ZnO-based micro-electro-mechanical systems (MEMS)
acoustic sensor has been reported. The sensor structure consists of a piezoelectric ZnO film …
acoustic sensor has been reported. The sensor structure consists of a piezoelectric ZnO film …