Interfacial chemistry of oxides on InxGa (1− x) As and implications for MOSFET applications

CL Hinkle, EM Vogel, PD Ye, RM Wallace - Current Opinion in Solid State …, 2011 - Elsevier
The prospect of enhanced device performance from III–V materials has been recognized for
at least 50years, and yet, relative to the phenomenal size of the Si-based IC industry, these …

Method for manufacturing a low defect interface between a dielectric and a III-V compound

C Merckling - US Patent 8,314,017, 2012 - Google Patents
The present invention is related to a method for manufacturing a low defect interface
between a dielectric material and an III-V compound. More specifically, the present invention …

Comparison of methods to quantify interface trap densities at dielectric/III-V semiconductor interfaces

R Engel-Herbert, Y Hwang, S Stemmer - Journal of applied physics, 2010 - pubs.aip.org
Methods to extract trap densities at high-permittivity (k) dielectric/III-V semiconductor
interfaces and their distribution in the semiconductor band gap are compared. The …

Surface passivation of III–V semiconductors for future CMOS devices—Past research, present status and key issues for future

H Hasegawa, M Akazawa, A Domanowska… - Applied surface …, 2010 - Elsevier
Currently, III–V metal–insulator–semiconductor field effect transistors (MISFETs) are
considered to be promising device candidates for the so-called “More Moore Approach” to …

Interface engineering and chemistry of Hf-based high-k dielectrics on III–V substrates

G He, X Chen, Z Sun - Surface Science Reports, 2013 - Elsevier
Recently, III–V materials have been extensively studied as potential candidates for post-Si
complementary metal-oxide-semiconductor (CMOS) channel materials. The main obstacle …

Detection of Ga suboxides and their impact on III-V passivation and Fermi-level pinning

CL Hinkle, M Milojevic, B Brennan, AM Sonnet… - Applied Physics …, 2009 - pubs.aip.org
The passivation of interface states remains an important problem for III-V based
semiconductor devices. The role of the most stable bound native oxides GaO x (0.5≤ x≤ …

Interface control and modification of band alignment and electrical properties of HfTiO/GaAs gate stacks by nitrogen incorporation

G He, J Liu, H Chen, Y Liu, Z Sun, X Chen… - Journal of Materials …, 2014 - pubs.rsc.org
Effects of nitrogen incorporation on the interface chemical bonding states, optical dielectric
function, band alignment, and electrical properties of sputtering-derived HfTiO high-k gate …

Defect states at III-V semiconductor oxide interfaces

L Lin, J Robertson - Applied Physics Letters, 2011 - pubs.aip.org
Models of insulating interfaces between (100) GaAs and HfO 2⁠, Gd 2 O 3⁠, and Al 2 O 3
are constructed and used to host various interfacial defects to see which give rise to gap …

Defect state passivation at III-V oxide interfaces for complementary metal–oxide–semiconductor devices

J Robertson, Y Guo, L Lin - Journal of Applied Physics, 2015 - pubs.aip.org
The paper describes the reasons for the greater difficulty in the passivation of interface
defects of III–V semiconductors like GaAs. These include the more complex reconstructions …

Interface engineering with an AlO x dielectric layer enabling an ultrastable Ta 3 N 5 photoanode for photoelectrochemical water oxidation

Y Zhao, G Liu, H Wang, Y Gao, T Yao… - Journal of Materials …, 2021 - pubs.rsc.org
Photoelectrochemical water splitting is a promising approach for solar energy to chemical
energy conversion. However, the development of highly stable and efficient photoanodes …