Micro and nanoelectromechanical systems M/NEMS have been extensively investigated
and exploited in the past few decades for various applications and for probing fundamental …

In this paper, we review a recent technology development based on coupled MEMS
resonators that has the potential of fundamentally transforming MEMS resonant sensors …

This article reviews the investigation of the mode-localized microelectromechanical system
(MEMS) coupled resonant sensors. This class of a sensor features a new approach in the …

This paper reports a high-sensitivity resonant electrometer based on the mode localization
of two degree-of-freedom weakly coupled resonators (WCRs). When charges are applied to …

A proof-of-concept force sensor based on three degree-of-freedom (DoF) weakly coupled
resonators was fabricated using a silicon-on-insulator (SOI) process and electrically tested …

This paper outlines the design of a novel mode-localized electric current sensor based on a
mechanically sensitive element of weakly coupled resonator systems. With the advantage of …

We report a new gas sensing technique based on the simultaneous tracking of multiple
modes of vibration of an electrothermally heated bridge resonator operated near the …

This paper reports a three degree-of-freedom (3DoF) microelectromechanical systems
(MEMS) resonant sensing device consisting of three weakly coupled resonators with …

This paper reports a novel mode-localized resonant accelerometer, which can keep high
sensitivity even over a wide range. To improve the adjustability of sensitivity, a new four …

This paper reports a closed-loop mode-localized accelerometer for the first time. The
accelerometer utilizes weakly coupled single-tine resonators as the sensing element to …