Recent advancements in physical and chemical MEMS sensors
Y Tanaka - Analyst, 2024 - pubs.rsc.org
Microelectromechanical systems (MEMSs) are microdevices fabricated using semiconductor-
fabrication technology, especially those with moving components. This technology has …
fabrication technology, especially those with moving components. This technology has …
A Grating Interferometric Acoustic Sensor Based on a Flexible Polymer Diaphragm
L Xiong, Z Qi - Sensors, 2023 - mdpi.com
This study presents a grating interferometric acoustic sensor based on a flexible polymer
diaphragm. A flexible-diaphragm acoustic sensor based on grating interferometry (GI) is …
diaphragm. A flexible-diaphragm acoustic sensor based on grating interferometry (GI) is …
Laser-Processed Protective Glass Micromesh Chips for Acoustic MEMS Sensors
G Acanfora, S Anzinger, B Winkler… - IEEE Sensors …, 2023 - ieeexplore.ieee.org
Acoustic microelectromechanical system (MEMS)-based sensors (ie, MEMS microphones)
are often operated in harsh and dusty environments where their main components of thin …
are often operated in harsh and dusty environments where their main components of thin …