Overview of materials and processes for lithography
RA Lawson, APG Robinson - Frontiers of nanoscience, 2016 - Elsevier
Computers and other electronic devices are an integral and ubiquitous part of the modern
world. One of the key drivers for the development, power, cost, and availability of these …
world. One of the key drivers for the development, power, cost, and availability of these …
Controlled collapse of high‐aspect‐ratio nanostructures
Capillary‐force‐induced collapse of high‐aspect‐ratio (HAR) micro‐and nanostructures is
common in the evaporation–drying process and a number of applications based on the …
common in the evaporation–drying process and a number of applications based on the …
Sub-20 nm laser ablation for lithographic dry development
DG De Oteyza, PN Perera, M Schmidt, M Falch… - …, 2012 - iopscience.iop.org
Pattern collapse of small or high aspect ratio lines during traditional wet development is a
major challenge for miniaturization in nanolithography. Here we report on a new dry process …
major challenge for miniaturization in nanolithography. Here we report on a new dry process …
Research on programmable capillary-force self-assembly nanofabrication
S Wei, J Zhang - … 8th Annual IEEE International Conference on …, 2013 - ieeexplore.ieee.org
The capillary-force which is an extremely important force in the small objects is considered
to be one of the most effective driving forces for the micro-nanoscale self-assembly …
to be one of the most effective driving forces for the micro-nanoscale self-assembly …