For decades, the revolution in design and fabrication methodology of flexible capacitive
pressure sensors using various inorganic/organic materials has significantly enhanced the …

Switch mode capacitive pressure sensors are proposed as a new class of microfabricated
devices that transform pressure into a mechanically switching capacitance to form an analog …

Abstract Capacitive Pressure Sensors have consistently been an indispensable application
of MEMS (Micro Electro Mechanical Systems) because of their utility and precision. Silicon …

We describe the fabrication and characterisation of a touch-mode capacitive pressure
sensor (TMCPS) with a robust design that comprises a graphene-polymer heterostructure …

Capacitive pressure sensors have several advantages in areas such as robotics,
automation, aerospace, biomedical and consumer electronics. We present mathematical …

MEMS vacuum gauges have received a great deal of attention in recent years. In this paper,
a MEMS capacitance diaphragm vacuum gauge with high sensitivity and wide range is …

Touch mode capacitive pressure sensor (TMCPS) is focused due to its advantages of good
linearity, mechanical robust and large overload protection for harsh industrial environment …

In this work, a fiber optic-based Fabry-Perot interferometer (FFPI) developed for
simultaneous heart rate (HR) and pulse pressure (PP) measurement was investigated …

A capacitive tactile sensor comprising two capacitors was developed to enhance detection
by more than doubling the spatial resolution. This arrangement reduced the number of …

Although silicon is the preferred choice for microelectromechanical systems (MEMS)
piezoresistive pressure sensors, such devices are not preferred for application in harsh …