Thin films at the micrometer and submicrometer scales exhibit mechanical properties that
are different than those of bulk polycrystals. Industrial application of these materials requires …

Metasurfaces offer the possibility to shape optical wavefronts with an ultracompact, planar
form factor. However, most metasurfaces are static, and their optical functions are fixed after …

Although bulk silicon is not susceptible to fatigue, micron‐scale silicon is. Several
mechanisms have been proposed to explain this surprising behavior although the issue …

A study has been made to discern the mechanisms for the delayed failure of 2-μm thick
structural films of n+-type, polycrystalline silicon under high-cycle fatigue loading conditions …

To evaluate the long-term durability properties of materials for microelectromechanical
systems (MEMS), the stress-life (S/N) cyclic fatigue behavior of a 2-μm thick polycrystalline …

The size effect on structural strength is an important phenomenon with a very old history.
Unfortunately, despite abundant experimental evidence, this phenomenon is still not taken …

The stability of resonant frequency for single wafer, thin-film encapsulated silicon MEMS
resonators was investigated for both long-term operation and temperature cycling. The …

In the absence of a corrosive environment, brittle materials such as silicon should be
immune to cyclic fatigue. However, fatigue effects are well known in micrometer-sized …

The objective of this work is to present a brief overview of a probabilistic design
methodology for brittle structures, review the literature for evidence of probabilistic behavior …

A fully coupled multi-dimensional continuum model of the thermoelectromechanics of GaN
HEMTs is presented and discussed. The governing equations are those of linear …