[HTML][HTML] The Effect of a Multihollow Cathode on the Self-Bias Voltage of Methane RF Discharge Used for aC: H Deposition
S Djerourou, K Henda, M Djebli - Journal of Modern Physics, 2011 - scirp.org
In this work we report the measurement of the self-bias voltage of radiofrequency (RF)
capacitevely coupled plasma, with a multihollow cathode and methane precursor, used for …
capacitevely coupled plasma, with a multihollow cathode and methane precursor, used for …