This paper demonstrates the first tests of friction, adhesion and wear properties of thin poly
(dimethylsiloxane)(PDMS) films on the sidewalls of silicon-on-insulator structures. The test …

A silicon (Si) platform, which consists of passive alignment structures (V-grooves), active
microelectromechanical systems (MEMS) alignment components, mechanical locking …

In this paper, we present a microelectromechanical systems-based two-degrees-of-freedom
positioning device combined with a clamping structure for positioning and constraining an …

The design, fabrication, and characterization of an electrothermally actuated lens scanner
with bistable mechanical brakes, for the application of free-space board-to-board optical …

Monocrystalline silicon microscanners are increasingly used in applications for image
projection, distance sensors, spectroscopy and laser beam control, because they allow the …

This paper describes a motor driver circuit for a high-power electrostatic motor using Field
Programmable Gate Array (FPGA). Electrostatic actuators are popular in the field of micron …

The scalability and cost of microelectromechanical systems (MEMS) optical switches are
now the important factors driving the development of MEMS optical switches technology …

In der vorliegenden Arbeit wird der Nachweis erbracht, dass ein miniaturisiertes
Schrittschaltwerk aus einkristallinem Silizium mittels verfügbarer Mikrotechnologien …

Flexure mechanisms are commonly used in electrostatic comb-drive actuators to achieve
large and stable strokes. The stable stroke length depends upon the spring stiffness ratio of …

Optical interconnects are the next evolutionary step for computer server systems, replacing
traditional copper interconnects to increase communication bandwidth and reduce overall …