The miniaturization of machine components is perceived by many as a requirement for the
future technological development of a broad spectrum of products. Miniature components …

Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to
provide the most complete MEMS coverage available. Thoroughly revised and updated the …

Measurement of surface topography plays an important role in manufacturing, being used
for both the control of manufacturing processes and for final product acceptance. These …

Chatter presents one of the main problems in quality of machined surfaces limiting tool life,
productivity, and tolerances. Chatter in milling and turning operations has been extensively …

From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications
details manufacturing techniques applicable to bionanotechnology. After reviewing MEMS …

以微径球头铣刀铣削力为研究对象, 分析了刀具刃线模型. 将刀具沿刀轴方向离散为若干切削
单元, 分别依照单齿切削及两齿切削求得各切削单元的实际瞬时切削厚度. 基于实体造型的方法 …

A micromachined scanning grating interferometer (µSGI) is presented for use in measuring
the out-of-plane vibration of microelectromechanical systems (MEMS). The µSGI uses a …

In this paper, a comprehensive introduction of micro milling technology, which is a novel
micro-manufacturing technology to fabricate many materials with complex 3D and high …

An array of micro scanning grating interferometers (μSGIs) with tunable gratings is designed,
fabricated and successfully tested for simultaneous static and dynamic displacement …

The miniaturization of machine components plays a very important role in the future
technological development of a broad spectrum of products owing to various advantages …