This thesis describes a general system simulation of microelectromechanical systems
(MEMS) based on lumped-parameter modeling. First-order analytic models are derived for …

Making submicron interelectrode gaps is the key to reducing the driving voltage of a micro
comb-drive electrostatic actuator. Two new fabrication technologies, oxidation machining …

The multi-disciplinary field of Micro-Electro-Mechanical Systems (MEMS), makes possible
the integration of mechanical and electrical elements at micron scale and their simultaneous …

An attempt has been made to summarize some of the important developments in the
emerging technology of microelectromechanical systems (MEMS) from the mechanical …

A distributed electrostatic micro actuator (DEMA) has been proposed. The actuator has
many small driving units which consist of two wave-like insulated electrodes. Both ends of …

A new concept for a micro vibratory rate gyroscope supported by fish-hook-shaped springs,
where the oscillating position sensing and force balancing take place on the wafer surface …

We have designed and fabricated three-dimensional (3D) stages driven by electrostatic
comb actuators. The stage consists of traveling tables, suspensions, and comb actuator (s) …

Different types of polysilicon comb actuators have been designed, fabricated, and operated.
The design was based on a finite-element stiffness modeling of the suspensions. In …

A process technology is developed for surface micromachining that achieves sub-
micrometer linewidths without the use of advanced lithography equipment. This technique is …

A newly developed linear electrostatic microactuator mechanism employing a vibrating
motion is described. In order to achieve a miniature charge coupled device (CCD) camera …