Emerging GaN technologies for power, RF, digital, and quantum computing applications: Recent advances and prospects

K Hoo Teo, Y Zhang, N Chowdhury… - Journal of Applied …, 2021 - pubs.aip.org
GaN technology is not only gaining traction in power and RF electronics but is also rapidly
expanding into other application areas including digital and quantum computing electronics …

PMUT and CMUT devices for biomedical applications: A review

E Moisello, L Novaresi, E Sarkar, P Malcovati… - IEEE …, 2024 - ieeexplore.ieee.org
Piezoelectric Micromachined Ultrasonic Transducers (PMUT) and Capacitive
Micromachined Ultrasonic Transducers (CMUT) have seen great developments in recent …

Design and characterization of an aluminum nitride-based MEMS hydrophone with biologically honeycomb architecture

L Jia, L Shi, C Liu, Y Yao, C Sun… - IEEE Transactions on …, 2021 - ieeexplore.ieee.org
In this article, we present a high-performance aluminum nitride (AlN)-based
microelectromechanical system (MEMS) hydrophone sensor, in which the sensing cells are …

Monitoring of physiological sounds with wearable device based on piezoelectric MEMS acoustic sensor

M Qu, X Chen, D Yang, D Li, K Zhu… - Journal of …, 2021 - iopscience.iop.org
Physiological mechano-acoustic signals play a pivotal role in medical diagnosis and fitness
monitoring. Mechanical waves generated by natural physiological activities such as …

A temperature-stable and low impedance piezoelectric MEMS resonator for drop-in replacement of quartz crystals

W Chen, W Jia, Y Xiao, Z Feng… - IEEE Electron Device …, 2021 - ieeexplore.ieee.org
In this letter, we report a highly temperature-stable and low impedance scandium doped
aluminum nitride (Sc x AI 1-x N,%) on silicon piezoelectric microelectromechanical system …

Enhancement of transmitting sensitivity of piezoelectric micromachined ultrasonic transducers by electrode design

L Jia, L Shi, C Liu, C Sun, G Wu - IEEE Transactions on …, 2021 - ieeexplore.ieee.org
This article investigates the dependence of transmitting sensitivity on the top electrode
design of piezoelectric micromachined ultrasonic transducers (PMUTs). Two typical top …

Piezoelectric micromachined ultrasonic transducer array-based electronic stethoscope for internet of medical things

L Jia, L Shi, C Liu, J Xu, Y Gao, C Sun… - IEEE Internet of …, 2022 - ieeexplore.ieee.org
A piezoelectric micromachined ultrasonic transducer (PMUT) array-based smart electronic
stethoscope is presented for Internet of Medical Things (IoMT). For the first time, an …

A high-performance 9.5% scandium-doped aluminum nitride piezoelectric MEMS hydrophone with honeycomb structure

L Jia, L Shi, Z Lu, C Sun, G Wu - IEEE Electron Device Letters, 2021 - ieeexplore.ieee.org
This letter presents a high-performance scandium-doped aluminum nitride (Sc x Al 1-x N, x=
9.5%) piezoelectric MEMS hydrophone. The doping of Sc increases the piezoelectric …

A miniaturized ultrasonic sugar concentration detection system based on piezoelectric micromachined ultrasonic transducers

L Shi, L Jia, C Liu, C Sun, S Liu… - IEEE Transactions on …, 2022 - ieeexplore.ieee.org
A miniaturized ultrasonic sugar concentration detection system based on piezoelectric
micromachined ultrasonic transducers (PMUTs) is presented in this work. An PMUT array …

[HTML][HTML] Fabrication and characterization of V-doped ZnO films implemented to lead-free piezoelectric micromachined devices

X Zhang, H Wu, Y Zhang, J Luo, T Ye, K Tao… - Journal of …, 2025 - Elsevier
Piezoelectric micromachined ultrasonic transducers (p-MUTs) have been extensively
utilized in medical imaging, range-finding, gesture recognition, and so on. However, the …