Emerging GaN technologies for power, RF, digital, and quantum computing applications: Recent advances and prospects
GaN technology is not only gaining traction in power and RF electronics but is also rapidly
expanding into other application areas including digital and quantum computing electronics …
expanding into other application areas including digital and quantum computing electronics …
PMUT and CMUT devices for biomedical applications: A review
Piezoelectric Micromachined Ultrasonic Transducers (PMUT) and Capacitive
Micromachined Ultrasonic Transducers (CMUT) have seen great developments in recent …
Micromachined Ultrasonic Transducers (CMUT) have seen great developments in recent …
Design and characterization of an aluminum nitride-based MEMS hydrophone with biologically honeycomb architecture
L Jia, L Shi, C Liu, Y Yao, C Sun… - IEEE Transactions on …, 2021 - ieeexplore.ieee.org
In this article, we present a high-performance aluminum nitride (AlN)-based
microelectromechanical system (MEMS) hydrophone sensor, in which the sensing cells are …
microelectromechanical system (MEMS) hydrophone sensor, in which the sensing cells are …
Monitoring of physiological sounds with wearable device based on piezoelectric MEMS acoustic sensor
M Qu, X Chen, D Yang, D Li, K Zhu… - Journal of …, 2021 - iopscience.iop.org
Physiological mechano-acoustic signals play a pivotal role in medical diagnosis and fitness
monitoring. Mechanical waves generated by natural physiological activities such as …
monitoring. Mechanical waves generated by natural physiological activities such as …
A temperature-stable and low impedance piezoelectric MEMS resonator for drop-in replacement of quartz crystals
W Chen, W Jia, Y Xiao, Z Feng… - IEEE Electron Device …, 2021 - ieeexplore.ieee.org
In this letter, we report a highly temperature-stable and low impedance scandium doped
aluminum nitride (Sc x AI 1-x N,%) on silicon piezoelectric microelectromechanical system …
aluminum nitride (Sc x AI 1-x N,%) on silicon piezoelectric microelectromechanical system …
Enhancement of transmitting sensitivity of piezoelectric micromachined ultrasonic transducers by electrode design
This article investigates the dependence of transmitting sensitivity on the top electrode
design of piezoelectric micromachined ultrasonic transducers (PMUTs). Two typical top …
design of piezoelectric micromachined ultrasonic transducers (PMUTs). Two typical top …
Piezoelectric micromachined ultrasonic transducer array-based electronic stethoscope for internet of medical things
L Jia, L Shi, C Liu, J Xu, Y Gao, C Sun… - IEEE Internet of …, 2022 - ieeexplore.ieee.org
A piezoelectric micromachined ultrasonic transducer (PMUT) array-based smart electronic
stethoscope is presented for Internet of Medical Things (IoMT). For the first time, an …
stethoscope is presented for Internet of Medical Things (IoMT). For the first time, an …
A high-performance 9.5% scandium-doped aluminum nitride piezoelectric MEMS hydrophone with honeycomb structure
This letter presents a high-performance scandium-doped aluminum nitride (Sc x Al 1-x N, x=
9.5%) piezoelectric MEMS hydrophone. The doping of Sc increases the piezoelectric …
9.5%) piezoelectric MEMS hydrophone. The doping of Sc increases the piezoelectric …
A miniaturized ultrasonic sugar concentration detection system based on piezoelectric micromachined ultrasonic transducers
L Shi, L Jia, C Liu, C Sun, S Liu… - IEEE Transactions on …, 2022 - ieeexplore.ieee.org
A miniaturized ultrasonic sugar concentration detection system based on piezoelectric
micromachined ultrasonic transducers (PMUTs) is presented in this work. An PMUT array …
micromachined ultrasonic transducers (PMUTs) is presented in this work. An PMUT array …
[HTML][HTML] Fabrication and characterization of V-doped ZnO films implemented to lead-free piezoelectric micromachined devices
Piezoelectric micromachined ultrasonic transducers (p-MUTs) have been extensively
utilized in medical imaging, range-finding, gesture recognition, and so on. However, the …
utilized in medical imaging, range-finding, gesture recognition, and so on. However, the …