Design and Analysis of Guided Surface Acoustic Waves in ScAlN on Sapphire for Phononic Integrated Circuits
This study presents a comprehensive dispersion analysis and characterization of guided
surface acoustic waves (SAWs) in 30% scandium aluminum nitride (ScAlN) alloy thin films …
surface acoustic waves (SAWs) in 30% scandium aluminum nitride (ScAlN) alloy thin films …
Compact Bends and Low-Loss Junctions for S0 Lamb Modes in Fully Etched Scandium Aluminum Nitride Acoustic Waveguides
This work demonstrates the use of focusing interdigitated transducers (FIDTs) to generate
confined S0 Lamb modes, in which they are captured and routed by acoustic waveguides …
confined S0 Lamb modes, in which they are captured and routed by acoustic waveguides …
Focused Guided Surface Acoustic Waves in 30% Scandium Aluminum Nitride on Silicon Carbide
Slow-on-fast piezoelectric platforms, which describe the relationship between the phase
velocity of a piezoelectric material to its substrate, have facilitated the development of guided …
velocity of a piezoelectric material to its substrate, have facilitated the development of guided …
Wavelength-Scale Focusing Transducer Based on Suspended Aluminum Nitride Thin Film
J Li, L Jin, M Du, P Wu, Y Liao… - 2024 IEEE Ultrasonics …, 2024 - ieeexplore.ieee.org
A wavelength-scale focusing transducer based on suspended Aluminum nitride (AlN)
piezoelectric thin film are designed, simulated and fabricated. The one port device was …
piezoelectric thin film are designed, simulated and fabricated. The one port device was …
[PDF][PDF] X-BAND FREQUENCY SCALING OF A0 AND S0 FOCUSED LAMB MODES FOR ACOUSTIC DELAY LINES IN 30% SCANDIUM ALUMINUM NITRIDE
Scandium-doped aluminum nitride (ScAlN) is a high electromechanical coupling, CMOS-
compatible piezoelectric material exhibiting high phase velocity Lamb modes. This work …
compatible piezoelectric material exhibiting high phase velocity Lamb modes. This work …