UV sensor based on surface acoustic waves in ZnO/fused silica
Zinc oxide (ZnO) thin films have been grown by radio frequency sputtering technique on
fused silica substrates. Optical and morphological characteristics of as-grown ZnO samples …
fused silica substrates. Optical and morphological characteristics of as-grown ZnO samples …
[HTML][HTML] Acoustoelectric Effect due to an In-Depth Inhomogeneous Conductivity Change in ZnO/Fused Silica Substrates
The acoustoelectric (AE) effect induced by the absorption of ultraviolet (UV) light at 365 nm
in piezoelectric ZnO films was theoretically and experimentally studied. c-ZnO films 4.0 µm …
in piezoelectric ZnO films was theoretically and experimentally studied. c-ZnO films 4.0 µm …
UV sensors based on the propagation of the fundamental and third harmonic Rayleigh waves in ZnO/fused silica
C Caliendo, D Cannatà, M Benetti… - 2023 9th International …, 2023 - ieeexplore.ieee.org
c-axis oriented piezoelectric ZnO layers were grown by rf reactive magnetron sputtering
technique onto fused silica substrates. The propagation of the fundamental mode, the …
technique onto fused silica substrates. The propagation of the fundamental mode, the …
Demonstration of High-overtone Bulk Acoustic Resonators using an Epitaxial ε-Ga2O3 Piezoelectric Film on SiC
Y Fu, S Chen, Y Tu, Z Zhang, Z Chen… - 2023 IEEE …, 2023 - ieeexplore.ieee.org
In this work, we developed novel high-overtone bulk acoustic resonators (HBARs) with only
top electrodes using an epitaxial ε-Ga 2 O 3 piezoelectric film on conductive SiC substrates …
top electrodes using an epitaxial ε-Ga 2 O 3 piezoelectric film on conductive SiC substrates …