An overview of microelectromechanical systems (MEMS) resonators for frequency reference
and timing applications is presented. The progress made in the past few decades in design …

In this paper, the basic concepts of the equivalent model, vibration modes, and conduction
mechanisms of MEMS resonators are described. By reviewing the existing representative …

In this paper, we present an experimental investigation of a water pipeline leak detection
system based on a low-cost, tiny-sized hydrophone sensor fabricated using the …

In this article, we present a high-performance aluminum nitride (AlN)-based
microelectromechanical system (MEMS) hydrophone sensor, in which the sensing cells are …

Compared to conventional sensors, resonant-based sensors output frequency signals
instead of voltage signals and therefore have greater advantages in terms of accuracy, noise …

In this letter, we report a highly temperature-stable and low impedance scandium doped
aluminum nitride (Sc x AI 1-x N,%) on silicon piezoelectric microelectromechanical system …

This article investigates the dependence of transmitting sensitivity on the top electrode
design of piezoelectric micromachined ultrasonic transducers (PMUTs). Two typical top …

In this article, we investigate the effects of dc bias voltage on characteristics for Aluminum
Nitride (AlN)-based piezoelectric micromachined ultrasonic transducers (PMUTs). As dc bias …

This letter reports temperature compensated single crystal silicon (SCS) bulk-mode
capacitive microelectromechanical system (MEMS) resonators with high temperature …

In this article, the design, implementation, and characterization of a micro-oven-controlled
dual-mode piezoelectric microelectromechanical system (MEMS) resonator are presented …