Existing auto-focusing methods in laser processing typically include two independent
modules, one for surface detection and another for z-axis adjustment. The latter is mostly …

A vison chromatic confocal sensor used to monitor the location of a measured point is
proposed and experimentally verified. To induce chromatic aberration of the sensor, a …

A multi-wavelength confocal displacement sensor based on a flat-field concave grating
(FFCG) was proposed and designed; the large dispersion and small volume of the FFCG …

Increasing range of applications of spectral detection has brought more attention to
spectrometers. Some of the existing spectrometers are no longer relevant to the demands of …

A novel, to the best of our knowledge, bionic coaxial micro-displacement sensor based on
the shadow method is developed and experimentally demonstrated inspired by the water …

We design, fabricate, and measure high-speed resonant varifocal mirrors for a reflective type
focus scanning optical element. A circumference supported type mirror and a node …

In this study, an in-process depth monitoring method was developed to improve the
atmospheric-pressure plasma jet (APPJ) etching process. Although the APPJ etching …

Micromirrors with variable focal length are critical components of various optical systems.
However, due to the limitations of microfabrication and actuation mechanisms, it is very …

Existing auto-focusing methods in laser processing typically include two independent
modules, one for surface detection and another for z-axis adjustment. The latter is mostly …

We propose and investigate fine cracks detection on the surface of a step profile object by
using a laser displacement measurement system based on signal intensity correlation. The …