[PDF][PDF] Thermal annealing ambiance effect on phosphorus passivation and reactivation mechanisms in silicon-based Schottky diodes hydrogenated by MW-ECR …
The main objective of this work is to investigate the effect of thermal annealing in forming
gas atmosphere on the mechanism of deactivation and reactivation of phosphorus in silicon …
gas atmosphere on the mechanism of deactivation and reactivation of phosphorus in silicon …
Optical Characteristics of Antireflection of SiN Layer on the Si Substrate
H Chen, D Xie - … and Intelligent Transportation Systems: Volume 1 …, 2016 - Springer
This paper studies the optical characteristics of SiN antireflection coating (ARC) on the Si
substrate and mainly focuses on the effects of different wavelength and angle of incident …
substrate and mainly focuses on the effects of different wavelength and angle of incident …