Scalable fabrication of carbon-based MEMS/NEMS and their applications: a review
The carbon-based micro/nano electromechanical system (MEMS/NEMS) technique provides
a powerful approach to large-scale manufacture of high-aspect-ratio carbon structures for …
a powerful approach to large-scale manufacture of high-aspect-ratio carbon structures for …
Sub-10-nm half-pitch electron-beam lithography by using poly (methyl methacrylate) as a negative resist
Developing high-resolution resists and processes for electron-beam lithography is of great
importance for high-density magnetic storage, integrated circuits, and nanoelectronic and …
importance for high-density magnetic storage, integrated circuits, and nanoelectronic and …
Thermal conductivity detector (TCD)-type gas sensor based on a batch-fabricated 1D nanoheater for ultra-low power consumption
Thermal conductivity detectors (TCDs) are widely used to detect high-concentration gases or
identify low-concentration gases in chromatography, owing to their fast response and …
identify low-concentration gases in chromatography, owing to their fast response and …
Preparing patterned carbonaceous nanostructures directly by overexposure of PMMA using electron-beam lithography
The overexposure process of poly (methyl methacrylate)(PMMA) was studied in detail using
electron-beam lithography. It was found that PMMA films could be directly patterned without …
electron-beam lithography. It was found that PMMA films could be directly patterned without …
The Young's modulus of high-aspect-ratio carbon/carbon nanotube composite microcantilevers by experimental and modeling validation
This paper reports the Young's modulus of a carbon nanotube (CNT)-reinforced carbon/CNT
(C/CNT) composite microcantilevers measured by laser Doppler vibrometer and validated …
(C/CNT) composite microcantilevers measured by laser Doppler vibrometer and validated …
Electric-field-assisted contact mode atomic force microscope-based nanolithography with low stiffness conductive probes
Electric-field-assisted atomic force microscope (E-AFM) nanolithography is a novel polymer-
patterning technique that has diverse applications. E-AFM uses a biased atomic force …
patterning technique that has diverse applications. E-AFM uses a biased atomic force …
Microstructuring of carbon/tin quantum dots via a novel photolithography and pyrolysis-reduction process
A novel microfabrication process based on optimized photolithography combined with
pyrolysis-reduction is proposed to fabricate interdigital porous carbon/tin quantum dots …
pyrolysis-reduction is proposed to fabricate interdigital porous carbon/tin quantum dots …
Fabrication of CNT-carbon composite microstructures using Si micromolding and pyrolysis
A fabrication method of carbon nanotube (CNT)-carbon composite microstructures has been
developed. CNT-carbon composite microstructures with dimensions from 10 micrometers to …
developed. CNT-carbon composite microstructures with dimensions from 10 micrometers to …
C-MEMS based microsupercapacitors and microsensors
The rapid development of miniaturized electronic devices has led to a growing need for
rechargeable micro-power sources with high performances. Miniaturized micro …
rechargeable micro-power sources with high performances. Miniaturized micro …
Supported pyrolysis for lithographically defined 3D carbon microstructures
WM Jin, JH Moon - Journal of Materials Chemistry, 2011 - pubs.rsc.org
We present a facile and effective route for the fabrication of carbon microstructures by direct
carbonization of polymeric photoresist patterns without distortion or collapse of the …
carbonization of polymeric photoresist patterns without distortion or collapse of the …