State of the art and future perspectives in advanced CMOS technology

HH Radamson, H Zhu, Z Wu, X He, H Lin, J Liu… - Nanomaterials, 2020 - mdpi.com
The international technology roadmap of semiconductors (ITRS) is approaching the
historical end point and we observe that the semiconductor industry is driving …

Nanosheet field effect transistors-A next generation device to keep Moore's law alive: An intensive study

J Ajayan, D Nirmal, S Tayal, S Bhattacharya… - Microelectronics …, 2021 - Elsevier
Incessant downscaling of feature size of multi-gate devices such as FinFETs and gate-all-
around (GAA) nanowire (NW)-FETs leads to unadorned effects like short channel effects …

A review of the gate-all-around nanosheet FET process opportunities

S Mukesh, J Zhang - Electronics, 2022 - mdpi.com
In this paper, the innovations in device design of the gate-all-around (GAA) nanosheet FET
are reviewed. These innovations span enablement of multiple threshold voltages and …

Miniaturization of CMOS

HH Radamson, X He, Q Zhang, J Liu, H Cui, J Xiang… - Micromachines, 2019 - mdpi.com
When the international technology roadmap of semiconductors (ITRS) started almost five
decades ago, the metal oxide effect transistor (MOSFET) as units in integrated circuits (IC) …

Improvement in self-heating characteristic by incorporating hetero-gate-dielectric in gate-all-around MOSFETs

YS Song, JH Kim, G Kim, HM Kim… - IEEE Journal of the …, 2020 - ieeexplore.ieee.org
For improving self-heating effects (SHEs) in gate-all-around metal-oxide-semiconductor field-
effect transistors (GAA MOSFETs), hetero-gate-dielectric (HGD) is utilized. The HGD consists …

A critical review on performance, reliability, and fabrication challenges in nanosheet FET for future analog/digital IC applications

S Valasa, S Tayal, LR Thoutam, J Ajayan… - Micro and …, 2022 - Elsevier
This article critically reviews the fabrication challenges, emerging materials (wafer, high-k
oxide, gate metal, channel materials), dimensional influences, thermal effects, growth …

Simulation of the effect of parasitic channel height on characteristics of stacked gate-all-around nanosheet FET

Y Choi, K Lee, KY Kim, S Kim, J Lee, R Lee… - Solid-State …, 2020 - Elsevier
By using technology computer aided design (TCAD) simulation, the aim of this paper is to
investigate the effect of Si parasitic channel, which is placed under stacked nanosheet …

Design optimization techniques in nanosheet transistor for RF applications

P Kushwaha, A Dasgupta, MY Kao… - … on Electron Devices, 2020 - ieeexplore.ieee.org
Nanosheet gate-all-around transistors are analyzed for RF applications using calibrated
TCAD simulations. The effects of stack spacing and number of stacks on device performance …

A machine learning approach for optimization of channel geometry and source/drain doping profile of stacked nanosheet transistors

H Xu, W Gan, L Cao, C Yang, J Wu… - … on Electron Devices, 2022 - ieeexplore.ieee.org
Complex nonlinear dependence of ultra-scaled transistor performance on its channel
geometry and source/drain (S/D) doping profile bring obstacles in the advanced technology …

Multi- Strategies of 7-nm node Nanosheet FETs With Limited Nanosheet Spacing

JS Yoon, J Jeong, S Lee… - IEEE Journal of the …, 2018 - ieeexplore.ieee.org
In this paper, multi-threshold voltage (V th) scheme of 7-nm node nanosheet FETs (NSFETs)
with narrow NS spacing were successfully achieved by metal-gate work function (WF) and …