MEMS piezoresistive pressure sensor with patterned thinning of diaphragm

Z Kordrostami, K Hassanli, A Akbarian - Microelectronics International, 2020 - emerald.com
Purpose The purpose of this study is to find a new design that can increase the sensitivity of
the sensor without sacrificing the linearity. A novel and very efficient method for increasing …

A conceptual study on novel current mirror integrated cantilever (CMIC) mass sensor for micro-gram (g) range sensing applications

M Tetseo, K Gogoi, S Kumar, G Kumar… - Microsystem …, 2024 - Springer
The work reported in this paper describes the design and simulation of a novel current mirror
readout circuit based MOSFET integrated cantilever structure for micro-gram (μ g) mass …

A pressure-sensitive oscillator for neuromorphic applications

BKS Muralidhar, R Ashkrizzadeh… - … circuits and systems …, 2022 - ieeexplore.ieee.org
A post-CMOS compatible pressure sensor and associated readout electronic circuits are
presented, which in combination yield a pressure sensitive artificial neuron with spike …

Design and simulation of a novel dual current mirror based CMOS‐MEMS integrated pressure sensor

S Kumar, GD Ropmay, PK Rathore… - IET Science …, 2021 - Wiley Online Library
This paper presents a novel dual current mirror based CMOS circuit for design and
development of highly sensitive CMOS‐MEMS integrated pressure sensors. The proposed …

The design and simulation of a MOSFET-based MEMS pressure sensor using an integrated simulation approach

W Wolde, P Gupta - Journal of Computational Electronics, 2021 - Springer
A novel integrated design and simulation approach is applied to analyze the performance of
a metal–oxide–semiconductor field-effect transistor (MOSFET)-based …

MEMS micro-bridge structure-based process platform fabricated with CMOS Al BEOL compatible process

X Kang, X Zhong, R Shen, Q Zuo, M Li… - Japanese Journal of …, 2019 - iopscience.iop.org
A common MEMS micro-bridge structure-based process was developed on 200 mm
standard CMOS Al back end of line. Thick amorphous-Si (alpha-Si) film was developed and …

Fabrication and testing of PMOS current mirror-integrated MEMS pressure transducer

S Kumar, GD Ropmay, PK Rathore, P Rangababu… - Sensor …, 2020 - emerald.com
Purpose This paper aims to describe the fabrication, packaging and testing of a resistive
loaded p-channel metal-oxide-semiconductor field-effect transistor-based (MOSFET-based) …

Sensitivity enhancement of P-and N-MOS based current mirror pressure sensor using differential amplifier

S Kumar, GD Ropmay, PK Rathore… - AIP Conference …, 2020 - pubs.aip.org
The aim of this work is to enhance the full scale output voltage and sensitivity of a PMOS
based current-mirror integrated pressure sensor. A source coupled differential amplifier has …

Optimization of Protective Layer Process for Micro-bridge Structure based MEMS/Sensors Application

B Zhang, X Kang, X Zhong - 2021 IEEE 14th International …, 2021 - ieeexplore.ieee.org
In this work, erosion problem was found in MEMS micro-bridge structure based sensor
product during dry releasing process. Failure analysis was implemented to found the root …