Riccardo Poli, William B. Langdon, Nicholas F. McPhee: A Field Guide to Genetic Programming: Lulu. com, 2008, 250 pp, ISBN 978-1-4092-0073-4

M O'Neill - 2009 - Springer
The latest book on Genetic Programming, Poli, Langdon and McPhee's (with contributions
from John R. Koza) A Field Guide to Genetic Programming represents an exciting landmark …

Control relevant issues in semiconductor manufacturing: Overview with some new results

AJ Su, JC Jeng, HP Huang, CC Yu, SY Hung… - Control Engineering …, 2007 - Elsevier
The quality control of integrated circuit (IC) processing is becoming more and more
important as the wafer becomes larger and the feature size shrinks. However, an advanced …

Genetic programming: An introduction and tutorial, with a survey of techniques and applications

WB Langdon, R Poli, NF McPhee, JR Koza - Computational intelligence: A …, 2008 - Springer
The goal of having computers automatically solve problems is central to artificial
intelligence, machine learning, and the broad area encompassed by what Turing called …

Eigenspectrum-based iterative learning control for a class of distributed parameter system

T Xiao, HX Li - IEEE Transactions on Automatic Control, 2016 - ieeexplore.ieee.org
In many practical distributed parameter systems (DPSs), the states of the systems are
required to track a desired trajectory repeatedly over a finite duration. It is hard to design the …

Genetic programming applications in chemical sciences and engineering

R Vyas, P Goel, SS Tambe - Handbook of genetic programming …, 2015 - Springer
Abstract Genetic programming (GP)(Koza, Genetic programming: a paradigm for genetically
breeding populations of computer programs to solve problems, Stanford University …

Identification and autotuning of temperature-control system with application to injection molding

T Liu, K Yao, F Gao - IEEE transactions on control systems …, 2009 - ieeexplore.ieee.org
Motivated by the practical barrel-temperature control of injection molding, this paper
proposes two identification methods and a united control scheme for general temperature …

Dominant-modes-based sliding-mode observer for estimation of temperature distribution in rapid thermal processing system

T Xiao, XD Li, S Wang - IEEE Transactions on Industrial …, 2018 - ieeexplore.ieee.org
A novel method for the estimation of the temperature distribution in a rapid thermal
processing (RTP) system is developed in this paper. The proposed method uses a proper …

[HTML][HTML] Observer design for a nonlinear heat equation: Application to semiconductor wafer processing

A Schaum, S Koch, M Kleindienst… - Journal of Process …, 2022 - Elsevier
In this paper, the problem of observer design for a class of 1D nonlinear heat equations with
pointwise in-domain temperature measurements is addressed. A pointwise measurement …

Boundary optimal control for parabolic distributed parameter systems with value iteration

J Sun, B Luo, X Xu, C Yang - IEEE Transactions on Cybernetics, 2022 - ieeexplore.ieee.org
A reinforcement learning-based boundary optimal control algorithm for parabolic distributed
parameter systems is developed in this article. First, a spatial Riccati-like equation and an …

Sliding mode control design for a rapid thermal processing system

T Xiao, HX Li - Chemical Engineering Science, 2016 - Elsevier
A sliding mode control strategy is developed for temperature control of a rapid thermal
processing (RTP) system to enhance temperature accuracy and uniformity when heating in …