New development of atomic layer deposition: processes, methods and applications

PO Oviroh, R Akbarzadeh, D Pan… - … and technology of …, 2019 - Taylor & Francis
Atomic layer deposition (ALD) is an ultra-thin film deposition technique that has found many
applications owing to its distinct abilities. They include uniform deposition of conformal films …

Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends

V Miikkulainen, M Leskelä, M Ritala… - Journal of Applied …, 2013 - pubs.aip.org
Atomic layer deposition (ALD) is gaining attention as a thin film deposition method, uniquely
suitable for depositing uniform and conformal films on complex three-dimensional …

Emerging applications of atomic layer deposition for lithium‐ion battery studies

X Meng, XQ Yang, X Sun - Advanced Materials, 2012 - Wiley Online Library
Lithium‐ion batteries (LIBs) are used widely in today's consumer electronics and offer great
potential for hybrid electric vehicles (HEVs), plug‐in HEVs, pure EVs, and also in smart grids …

Atomic layer deposition of nanostructured materials for energy and environmental applications

C Marichy, M Bechelany, N Pinna - Advanced materials, 2012 - Wiley Online Library
Atomic layer deposition (ALD) is a thin film technology that in the past two decades rapidly
developed from a niche technology to an established method. It proved to be a key …

Tailoring nanoporous materials by atomic layer deposition

C Detavernier, J Dendooven, SP Sree… - Chemical Society …, 2011 - pubs.rsc.org
Atomic layer deposition (ALD) is a cyclic process which relies on sequential self-terminating
reactions between gas phase precursor molecules and a solid surface. The self-limiting …

An all-in-one nanopore battery array

C Liu, EI Gillette, X Chen, AJ Pearse, AC Kozen… - Nature …, 2014 - nature.com
A single nanopore structure that embeds all components of an electrochemical storage
device could bring about the ultimate miniaturization in energy storage. Self-alignment of …

Titanium dioxide thin films by atomic layer deposition: A review

JP Niemelä, G Marin, M Karppinen - Semiconductor science and …, 2017 - iopscience.iop.org
Within its rich phase diagram titanium dioxide is a truly multifunctional material with a
property palette that has been shown to span from dielectric to transparent-conducting …

Atomically Precise Growth of Catalytically Active Cobalt Sulfide on Flat Surfaces and within a Metal–Organic Framework via Atomic Layer Deposition

AW Peters, Z Li, OK Farha, JT Hupp - Acs Nano, 2015 - ACS Publications
Atomic layer deposition (ALD) has been employed as a new synthetic route to thin films of
cobalt sulfide on silicon and fluorine-doped tin oxide platforms. The self-limiting nature of the …

Aqueous Rechargeable Alkaline CoxNi2–xS2/TiO2 Battery

J Liu, J Wang, Z Ku, H Wang, S Chen, L Zhang, J Lin… - ACS …, 2016 - ACS Publications
An electrochemical energy storage system with high energy density, stringent safety, and
reliability is highly desirable for next-generation energy storage devices. Here an aqueous …

Ozone-Based Atomic Layer Deposition of Crystalline V2O5 Films for High Performance Electrochemical Energy Storage

X Chen, E Pomerantseva, P Banerjee… - Chemistry of …, 2012 - ACS Publications
A new atomic layer deposition (ALD) process for V2O5 using ozone (O3) as oxidant has
been developed that resulted in crystalline V2O5 thin films which are single-phase and …