Recent developments in surface science and engineering, thin films, nanoscience, biomaterials, plasma science, and vacuum technology
Nanometer-sized structures, surfaces and sub-surface phenomena have played an
enormous role in science and technological applications and represent a driving-force of …
enormous role in science and technological applications and represent a driving-force of …
eduPIC: an introductory particle based code for radio-frequency plasma simulation
Particle based simulations are indispensable tools for numerical studies of charged particle
swarms and low-temperature plasma sources. The main advantage of such approaches is …
swarms and low-temperature plasma sources. The main advantage of such approaches is …
Current status and nature of high-frequency electronegative plasmas: basis for material processing in device manufacturing
T Makabe - Japanese Journal of Applied Physics, 2019 - iopscience.iop.org
A non-equilibrium electronegative plasma serves as the reactive source for semiconductor
dry processing as an advanced technology. This paper reviews the current knowledge about …
dry processing as an advanced technology. This paper reviews the current knowledge about …
Electron power absorption dynamics in capacitive radio frequency discharges driven by tailored voltage waveforms in CF4
S Brandt, B Berger, E Schüngel, I Korolov… - Plasma Sources …, 2016 - iopscience.iop.org
The power absorption dynamics of electrons and the electrical asymmetry effect in
capacitive radio-frequency plasmas operated in CF 4 and driven by tailored voltage …
capacitive radio-frequency plasmas operated in CF 4 and driven by tailored voltage …
Spatial flux and energy asymmetry in a low pressure capacitively coupled plasma discharge excited by sawtooth waveform: A harmonic study
Plasma asymmetry generation in capacitively coupled plasma (CCP) discharges provides
control over vital parameters that are useful in many plasma processing applications. In this …
control over vital parameters that are useful in many plasma processing applications. In this …
Control of electron dynamics, radical and metastable species generation in atmospheric pressure RF plasma jets by Voltage Waveform Tailoring
Atmospheric pressure capacitively coupled radio frequency discharges operated in He/N 2
mixtures and driven by tailored voltage waveforms are investigated experimentally using a …
mixtures and driven by tailored voltage waveforms are investigated experimentally using a …
2D particle-in-cell simulations of geometrically asymmetric low-pressure capacitive RF plasmas driven by tailored voltage waveforms
The effects of the simultaneous presence of two different types of plasma asymmetry, viz,
geometric and electrical, on low-pressure capacitively coupled argon discharges are studied …
geometric and electrical, on low-pressure capacitively coupled argon discharges are studied …
Ion energy distribution function in very high frequency capacitive discharges excited by saw-tooth waveform
Tailoring the ion energy distribution function (IEDF) is vital for advanced plasma processing
applications. Capacitively coupled plasma (CCP) discharges excited using a non-sinusoidal …
applications. Capacitively coupled plasma (CCP) discharges excited using a non-sinusoidal …
Ion energy distribution functions in a dual-frequency low-pressure capacitively-coupled plasma: experiments and particle-in-cell simulation
Abstract Low-pressure (< 10 s mTorr) multi-frequency capacitively coupled plasmas (CCPs)
are essential for critical plasma processing applications such as high aspect ratio dielectric …
are essential for critical plasma processing applications such as high aspect ratio dielectric …
Application of similarity laws to dual-frequency capacitively coupled radio frequency plasmas with the electrical asymmetry effect
Similarity laws (SLs) are useful for correlation and prediction of plasma parameters at
different scales, which have been verified for geometrically symmetric capacitive radio …
different scales, which have been verified for geometrically symmetric capacitive radio …