Effect of AlN and AlGaN interlayers on AlScN/GaN heterostructures grown by metal–organic chemical vapor deposition

I Streicher, S Leone, C Manz, L Kirste… - Crystal Growth & …, 2023 - ACS Publications
AlScN/GaN heterostructures with their high sheet carrier density (ns) in the two-dimensional
electron gas (2DEG) have a high potential for high-frequency and high-power electronics …

Diffusion in GaN/AlN superlattices: DFT and EXAFS study

IA Aleksandrov, TV Malin, KS Zhuravlev… - Applied Surface …, 2020 - Elsevier
We report theoretical and experimental study of diffusion processes at GaN/AlN interfaces.
Using climbing image nudged elastic band method with density functional theory (DFT) we …

Effect of High Temperature on the Performance of AlGaN/GaN T-Gate High-Electron Mobility Transistors With 140-nm Gate Length

AE Islam, NP Sepelak, AT Miesle, H Lee… - … on Electron Devices, 2024 - ieeexplore.ieee.org
High temperature (HT) electronics applications will require the development of a broad
range of devices made using different materials. Among these devices, high-electron …

Thermal budget increased alloy disorder scattering of 2DEG in III–N heterostructures

H Yu, B Parvais, M Zhao, R Rodriguez… - Applied Physics …, 2022 - pubs.aip.org
High-temperature processing steps are frequently used in manufacture of AlGaN/(AlN/) GaN
high electron mobility transistors (HEMTs). The thermal budgets drive Al diffusion into the …

Control of the mechanical adhesion of III–V materials grown on layered h-BN

P Vuong, S Sundaram, A Mballo… - … Applied Materials & …, 2020 - ACS Publications
Hexagonal boron nitride (h-BN) can be used as a p-doped material in wide-bandgap
optoelectronic heterostructures or as a release layer to allow lift-off of grown three …

Atomic layer etching technique for InAlN/GaN heterostructure with AlN etch-stop layer

F Du, Y Jiang, Z Qiao, Z Wu, C Tang, J He… - Materials Science in …, 2022 - Elsevier
An atomic layer etching (ALE) technique for InAlN/AlN/GaN structure was investigated for the
first time. Different recipes with O 2 modification times of 30–180 s and BCl 3 removal RF …

[HTML][HTML] Impact of Al profile in high-Al content AlGaN/GaN HEMTs on the 2DEG properties

A Papamichail, AR Persson, S Richter… - Applied Physics …, 2024 - pubs.aip.org
Ultra-thin high-Al content barrier layers can enable improved gate control and high-
frequency operation of AlGaN/GaN high electron mobility transistors (HEMTs) but the …

Modeling of the Point Defect Migration across the AlN/GaN Interfaces—Ab Initio Study

R Hrytsak, P Kempisty, E Grzanka, M Leszczynski… - Materials, 2022 - mdpi.com
The formation and diffusion of point defects have a detrimental impact on the functionality of
devices in which a high quality AlN/GaN heterointerface is required. The present paper …

Interdiffusion of Al and Ga in AlN/AlGaN superlattices grown by ammonia-assisted molecular beam epitaxy

M Nemoz, F Semond, S Rennesson, M Leroux… - Superlattices and …, 2021 - Elsevier
Abstract Diffusion at the AlN/Al 0.3 Ga 0.7 N interface was investigated by X-ray diffraction,
high-angle annular dark field scanning transmission electron microscopy and energy …

[PDF][PDF] Reduction of dislocations in α-Ga2O3 epilayers grown by halide vapor-phase epitaxy on a conical frustum-patterned sapphire substrate

H Son, Y Choi, SK Hong, JH Park, DW Jeon - IUCrJ, 2021 - journals.iucr.org
The compound α-Ga2O3 is an ultra-wide-bandgap semiconductor and possesses
outstanding properties such as a high breakdown voltage and symmetry compared with …