Low dark current lateral Ge PIN photodetector array with resonant cavity effect for short wave infrared imaging

L Yao, R Ji, S Wu, J Jiao, F He, D Wang… - Journal of Physics D …, 2024 - iopscience.iop.org
High-performance germanium (Ge) lateral PIN photodetector (PD) arrays for short wave
infrared (SWIR) imaging based on Ge-on-insulator (GOI) platform was proposed and …

Reduced threading dislocation density in a Ge epitaxial film on a submicron-patterned Si substrate grown by chemical vapor deposition

MFB Amin, T Hizawa, JA Piedra-Lorenzana… - Journal of Electronic …, 2023 - Springer
A patterned Si substrate is used to reduce the threading dislocation density (TDD) in a Ge
epitaxial film for near-infrared photonic device applications. Using photolithography and dry …

Review of Short-Wavelength Infrared Flip-Chip Bump Bonding Process Technology

J Du, X Zhao, J Su, B Li, X Duan, T Dong, H Lin, Y Ren… - Sensors, 2025 - mdpi.com
Short-wave infrared (SWIR) imaging has a wide range of applications in civil and military
fields. Over the past two decades, significant efforts have been devoted to developing high …

Single microhole per pixel for thin Ge-on-Si complementary metal-oxide semiconductor image sensor with enhanced sensitivity up to 1700 nm

E Ponizovskaya-Devine, AS Mayet… - Journal of …, 2023 - spiedigitallibrary.org
We present a germanium “Ge-on-Si” CMOS image sensor with backside illumination for the
near-infrared (NIR) electromagnetic waves (wavelength range 300 to 1700 nm) detection …

Enhancing the performance of surface-textured Ge Schottky photodetectors using the electroless chemical etching method

M Zumuukhorol, S Boldbaatar, Z Khurelbaatar… - Materials Science in …, 2024 - Elsevier
We employed a technique to enhance the performance of Ge Schottky photodetectors (PDs),
namely using an electroless chemical etching method to create an antireflective surface …

[PDF][PDF] Fabrication and characterisation of the PiN Ge photodiode with poly-crystalline Si: P as n-type region

Q Durlin, A Aliane, L André, H Kaya… - Opto-Electronics …, 2023 - bibliotekanauki.pl
Germanium (Ge) PiN photodetectors are fabricated and electro-optically characterised.
Unintentionally and p-type doped Ge layers are grown in a reduced-pressure chemical …

GeSn-on-Si avalanche photodiodes for short-wave infrared detection

M Wanitzek, M Oehme, C Spieth… - … 2022-IEEE 48th …, 2022 - ieeexplore.ieee.org
In this work, we report the growth, fabrication, and characterization of GeSn-on-Si Avalanche
Photodiodes with a Sn concentration of up to 2.2%. The Ge 1-x Sn x absorption layer was …

Trench-Filling Epitaxy of Germanium on (001) Silicon Enhanced Using [100]-Oriented Patterns

K Kato, K Motomura, JA Piedra-Lorenzana… - Journal of Electronic …, 2023 - Springer
This paper reports trench-filling epitaxy of Ge on (001) Si using [100]-oriented patterns,
which is effective to fill the micron-deep trench in a short growth time. As a starting substrate …

Highly Integrated Ultra-Low Leakage Current Shortwave Infrared Photodetector Based on Ge-Si Heterogenous Wafer Bonding

R Ji, L Yao, J Jiao, G Xu, F Fu, G Lin… - IEEE Electron …, 2024 - ieeexplore.ieee.org
A shortwave infrared photodetector based on Ge-Si heterojunction is proposed and
fabricated by the innovative combination of epitaxy and wafer bonding method. This …

Ultralow Dark Current Small-Sized Germanium Photodetectors With a Self-Forming Guard Ring Structure

L Yao, Z Zhou, Y Zhu, Y Rao, Y Hu, C Li… - … on Electron Devices, 2024 - ieeexplore.ieee.org
The small-sized germanium (Ge) lateral photodetectors (PDs) with a ultralow dark current of
1.77 nA under− 1 V at room temperature were first realized by implementing a self-forming …