Review on High-Throughput Micro-Combinatorial Characterization of Binary and Ternary Layers towards Databases
The novel, single-sample concept combinatorial method, the so-called micro-combinatory
technique, has been shown to be suitable for the high-throughput and complex …
technique, has been shown to be suitable for the high-throughput and complex …
Micro-combinatorial sampling of the optical properties of hydrogenated amorphous for the entire range of compositions towards a database for …
The optical parameters of hydrogenated amorphous a-Si 1-x Ge x: H layers were measured
with focused beam mapping ellipsometry for photon energies from 0.7 to 6.5 eV. The applied …
with focused beam mapping ellipsometry for photon energies from 0.7 to 6.5 eV. The applied …
[HTML][HTML] Disorder and cavity evolution in single-crystalline Ge during implantation of Sb ions monitored in-situ by spectroscopic ellipsometry
T Lohner, A Németh, Z Zolnai, B Kalas… - Materials Science in …, 2022 - Elsevier
Ion implantation has been a key technology for the controlled surface modification of
materials in microelectronics and generally, for tribology, biocompatibility, corrosion …
materials in microelectronics and generally, for tribology, biocompatibility, corrosion …
High-Throughput Micro-Combinatorial TEM Phase Mapping of the DC Magnetron Sputtered YxTi1−xOy Thin Layer System
High-throughput methods are extremely important in today's materials science, especially in
the case of thin film characterization. The micro-combinatorial method enables the …
the case of thin film characterization. The micro-combinatorial method enables the …
Determination of the complex dielectric function of ion-implanted amorphous germanium by spectroscopic ellipsometry
T Lohner, E Szilágyi, Z Zolnai, A Németh, Z Fogarassy… - Coatings, 2020 - mdpi.com
Accurate reference dielectric functions play an important role in the research and
development of optical materials. Libraries of such data are required in many applications in …
development of optical materials. Libraries of such data are required in many applications in …
[HTML][HTML] Smart gas dosage by a peristaltic pump for reactive RF sputtering of composition spread combinatorial hafnium-oxy-nitride layers
Thin metal-oxy-nitride layers are widely used for wavelength selective optical coatings. We
aimed to prepare composition spread metal-oxy-nitride combinatorial layers by reactive …
aimed to prepare composition spread metal-oxy-nitride combinatorial layers by reactive …
[HTML][HTML] Scanning-resonance optical sensing based on a laterally graded plasmonic layer—optical properties of AgxAl1− x in the range of x= 0 to 1
Abstract Plasmonic AgAl/Si 3 N 4 sensor layer structure was deposited on a fused silica
glass slide by dual DC magnetron sputtering. The composition of the Ag x Al 1− x layer was …
glass slide by dual DC magnetron sputtering. The composition of the Ag x Al 1− x layer was …
[PDF][PDF] High-Throughput Micro-Combinatorial TEM Phase Mapping of the DC Magnetron Sputtered YxTi1− xOy Thin Layer System. Nanomaterials 2024, 14, 925
D Olasz, V Kis, I Cora, M Németh, G Sáfrán - 2024 - academia.edu
High-throughput methods are extremely important in today's materials science, especially in
the case of thin film characterization. The micro-combinatorial method enables the …
the case of thin film characterization. The micro-combinatorial method enables the …
In-Situ Control of Defect Dynamics By Ellipsometry During Ion Implantation–Evolution of Disorder and Cavity Structure in Single-Crystalline Ge During Implantation of …
T Lohner, A Németh, Z Zolnai, B Kalas… - SCIENTIFIC …, 2021 - real.mtak.hu
Ion implantation has been a key technology in microelectronics and generally, for the
controlled surface modi cation of materials for tribology, biocompatibility, corrosion …
controlled surface modi cation of materials for tribology, biocompatibility, corrosion …
[PDF][PDF] Thin Film Physics Department
I CORA, Z CZIGÁNY, Z FOGARASSY… - Institute of Technical … - real-j.mtak.hu
Conventional preparation of TEM samples in MTA EK MFA is carried out by Ar-ion beam
thinning so that the sample is mounted on the holder by carbon paste. Carbon …
thinning so that the sample is mounted on the holder by carbon paste. Carbon …