X-ray diffraction (XRD) techniques are powerful, non-destructive characterization tool with
minimal sample preparation. XRD provides the first information about the materials phases …

Micro-electro-mechanical system (MEMS) technology has radically changed the scale,
performance, and cost of a wide variety of sensors and actuators by taking advantage of …

Nitride coatings have been generally applied on light alloys like titanium and aluminium to
promote their multiple performances, including hardness, thermal stability and wear …

In order to adapt to the upgrading of wireless communication system, thin film bulk acoustic
resonator (FBAR) has become one of the research hotspots in the communication field. The …

The optical emission spectroscopy (OES) data provide multi-featured and high-dimension
data, which exhibit rich physical phenomena. The novel unsupervised learning uniform …

For an optimized performance of micro electromechanical systems (MEMS) double-clamped
bridge-type resonators for mechanical strain sensing, a modified sputter process was …

The main challenge in the commercialization of the RF-MEMS switches is their reliability,
related to both the electrical and mechanical domains. The development of test standards …

The present study reports the effect of bottom electrodes (Al, Pt & Ti) on the texture,
piezoelectric characteristics, dielectric properties and leakage current behavior of reactive …

Aluminum nitride (AlN) films with different optical properties were prepared by radio
frequency (RF) reactive magnetron sputtering technique under different nitrogen (N 2) flow …

This paper reports on the comparison of residual stresses in AlN thin films sputter-deposited
in identical conditions on Si (100)(110) and (111) substrates. The deposited films are of …