We investigate the Gilbert damping parameter α for rare earth (RE)–transition metal (TM)
ferrimagnets over a wide temperature range. Extracted from the field-driven magnetic …

Although the recently developed cutoff probe is a promising tool to precisely infer plasma
electron density by measuring the cutoff frequency (f cutoff) in the S 21 spectrum, it is …

The microwave cutoff probe (CP) is an accurate diagnostic technique to measure absolute
electron density even in processing gas plasmas. Because this technique needs the …

As low-temperature plasma plays an important role in semiconductor manufacturing, plasma
diagnostics have been widely employed to understand changes in plasma according to …

We present measurements of spin pumping detected by the inverse spin Hall effect voltage
and ferromagnetic resonance spectroscopy in a series of metallic ferromagnet/normal metal …

We investigated the effect of the sheath around the probe tips on the transmission spectrum
of a cutoff probe using an electromagnetic simulation and a circuit model. Our results show …

SiO2 etching characteristics were investigated in detail. Patterned SiO2 was etched using
radio-frequency capacitively coupled plasma with pulse modulation in a mixture of argon …

The previously proposed circuit model has proven to be a powerful tool to analyze and
improve the characteristics of the cutoff probe. This model revealed the mechanism of …

Recently, fluorocarbon (FC) film deposition on a SiO 2 surface has become one of the most
important processes in semiconductor manufacturing because the formation of a passivation …

As collisions between electrons and neutral particles constitute one of the most
representative physical phenomena in weakly ionized plasma, the electron-neutral (en) …