Similarity searching for wafer bin maps by measuring shape, location, and size similarities of defect patterns
MS Kang, JS Shin, DH Lee - Computers & Industrial Engineering, 2024 - Elsevier
A wafer bin map (WBM) is a visual representation of the spatial distribution of defective chips
on a wafer. WBMs showing specific defect patterns are usually a result of process …
on a wafer. WBMs showing specific defect patterns are usually a result of process …
Similarity searching for fault diagnosis of defect patterns in wafer bin maps
Due to the growing complexity of processes in semiconductor manufacturing, high volumes
of data are automatically generated, resulting in a greater challenge for fault detection and …
of data are automatically generated, resulting in a greater challenge for fault detection and …