Silicon MEMS inertial sensors evolution over a quarter century

G Langfelder, M Bestetti, M Gadola - Journal of Micromechanics …, 2021 - iopscience.iop.org
Silicon-based microelectromechanical systems (MEMS) inertial sensors have become
ubiquitous, revolutionizing motion sensing, vibration sensing and accurate positioning in …

A sub-0.1°/h bias-instability split-mode MEMS gyroscope with CMOS readout circuit

Y Zhao, J Zhao, X Wang, GM Xia, Q Shi… - IEEE Journal of Solid …, 2018 - ieeexplore.ieee.org
This paper describes a split-mode tuning fork MEMS gyroscope with CMOS readout circuit.
The gyroscope achieves 0.008°/angle random walk (ARW) and 0.08°/h bias instability (BI) …

A 27 0.06 mm2 Background Resonance Frequency Tuning Circuit Based on Noise Observation for a 1.71 mW CT- MEMS Gyroscope Readout System With …

M Marx, D De Dorigo, S Nessler… - IEEE Journal of Solid …, 2017 - ieeexplore.ieee.org
This paper presents the implementation of a bandpass filter tuning circuit solely based on
noise observation for a continuous-time (CT) delta-sigma modulator gyroscope readout …

[HTML][HTML] Ultra-low-noise TIA topology for MEMS gyroscope readout

M Serri, S Saeedi - AEU-International Journal of Electronics and …, 2020 - Elsevier
This paper proposes a TIA topology that can be used in accelerometer and gyroscope
systems. The proposed TIA topology considerably relaxes the trade-off among the …

Performance comparison of gyro-based and gyroless attitude estimation for cubesats

SH Mok, SY Byeon, H Bang, Y Choi - International Journal of Control …, 2020 - Springer
In this paper, a comparison study between gyro-based and gyroless approaches for
spacecraft attitude estimation is presented. Due to its vulnerability to the model errors, the …

Highly precise MEMS gyroscopes for fully automated driving

T Hiller - 2021 - 141.99.19.133
Future, fully automated vehicles pose strict requirements on the performance of inertial
sensors. Achievable accuracies of micro-electromechanical (MEMS) gyroscopes are …

[PDF][PDF] A practical PLL-based drive circuit with ultra-low-noise TIA for MEMS gyroscope

H Chen, Y Zhong, Z Meng - Chin. J. Sci. Instrum, 2017 - researchgate.net
A novel phase-locked loop (PLL)-based closed-loop driving circuit with ultra-low-noise trans-
impedance amplifier (TIA) is proposed. The TIA is optimized to achieve ultra-low input …

Sub-degree per hour split mode tuning fork gyroscope

Y Zhao, AP Qiu, Q Shi, GM Xia - 2016 IEEE International …, 2016 - ieeexplore.ieee.org
This paper demonstrates a high accurate split mode tuning fork gyroscope with sub-degree
per hour stability. The gyroscope sensing element is fabricated in an 80µm-thick SOI …

Research on the ring-diode based readout circuit for MEMS vibratory gyroscopes

X Wei, C He, Q Zhao, Z Yang… - 2017 IEEE 12th …, 2017 - ieeexplore.ieee.org
This work presents the analysis with experimental verification of ring-diode based readout
circuit for MEMS vibratory gyroscopes. Detailed deductions on the CV conversion and signal …

Research on dynamic development of vibrating gyroscope based on coriolis effect

C Zhilong, L Chaoqun, L Peng - 2020 IEEE 3rd International …, 2020 - ieeexplore.ieee.org
The basic principle of Coriolis effect based vibrating gyro is briefly summarized. The
structure, technology and performance of typical vibrating gyro based on Coriolis effect are …