PEALD of HfO2 Thin Films: Precursor Tuning and a New Near-Ambient-Pressure XPS Approach to in Situ Examination of Thin-Film Surfaces Exposed to Reactive …
D Zanders, E Ciftyurek, E Subaşı… - … applied materials & …, 2019 - ACS Publications
A bottom-up approach starting with the development of new Hf precursors for plasma-
enhanced atomic layer deposition (PEALD) processes for HfO2 followed by in situ thin-film …
enhanced atomic layer deposition (PEALD) processes for HfO2 followed by in situ thin-film …
Vapour sensitivity of an ALD hierarchical photonic structure inspired by Morpho
O Poncelet, G Tallier, SR Mouchet… - Bioinspiration & …, 2016 - iopscience.iop.org
The unique architecture of iridescent Morpho butterfly scales is known to exhibit different
optical responses to various vapours. However, the mechanism behind this phenomenon is …
optical responses to various vapours. However, the mechanism behind this phenomenon is …
Characteristics of PEALD–Hafnium dioxide films and their application to gate insulator stacks of photosynaptic transistors
J Kim, JW Lim, J Lee - Advanced Electronic Materials, 2022 - Wiley Online Library
For practical applications of photosynaptic devices in neuromorphic systems, photosynaptic
transistors prepared using TiO2 channels and TiO2/Al2O3 deep trap interfaces exhibit high …
transistors prepared using TiO2 channels and TiO2/Al2O3 deep trap interfaces exhibit high …
Field-enhanced direct tunneling in ultrathin atomic-layer-deposition-grown -Cr metal-insulator-metal structures
L Fry-Bouriaux, MC Rosamond, DA Williams… - Physical Review B, 2017 - APS
Metal-insulator-metal structures based on ultrathin high-k dielectric films are underpinning a
rapidly increasing number of devices and applications. Here, we report detailed electrical …
rapidly increasing number of devices and applications. Here, we report detailed electrical …
Low-temperature plasma-enhanced atomic layer deposition of HfO2/Al2O3 nanolaminate structure on Si
HfO 2/Al 2 O 3 nanolaminate was deposited on a Si substrate by plasma-enhanced atomic
layer deposition at 150 C with in situ plasma treatment. Unilayer HfO 2 and Al 2 O 3 films …
layer deposition at 150 C with in situ plasma treatment. Unilayer HfO 2 and Al 2 O 3 films …
Tunnel junction engineering for optimized metallic single-electron transistor
KG El Hajjam, MA Bounouar, N Baboux… - … on Electron Devices, 2015 - ieeexplore.ieee.org
The development of metallic single-electron transistor (SET) depends on the downscaling
and the electrical properties of its tunnel junctions (TJs). These TJs should insure high-ON …
and the electrical properties of its tunnel junctions (TJs). These TJs should insure high-ON …
Nanoscale tunnel junctions and metallic single-electron transistors via shadow evaporation and in situ atomic layer deposition of tunnel barriers
H Shimada, T Koike, K Kikkawa, H Konno… - ACS Applied Nano …, 2021 - ACS Publications
Nanoscale metallic tunnel junctions are important elements of state-of-the-art technologies
including superconducting qubits, single electronics, nanospintronics, and caloritronics. The …
including superconducting qubits, single electronics, nanospintronics, and caloritronics. The …
Metallic single electron transistors: Impact of parasitic capacitances on small circuits
G Droulers, S Ecoffey… - IEEE Transactions on …, 2017 - ieeexplore.ieee.org
A method of simulating metallic-island single electron transistors (SETs) and small circuits
which speeds up the design-fabrication-characterization cycle is proposed. The method …
which speeds up the design-fabrication-characterization cycle is proposed. The method …
Damascene planar metal-insulator-metal tunnel junctions
G Droulers, S Ecoffey, M Guilmain… - 14th IEEE …, 2014 - ieeexplore.ieee.org
In this paper, we show a process for the fabrication of planar sub-attofarad capacitance
metal-insulator-metal tunnel junctions with nanometer size. We show the engineering of the …
metal-insulator-metal tunnel junctions with nanometer size. We show the engineering of the …
Investigation of the in-plane and out-of-plane electrical properties of metallic nanoparticles in dielectric matrix thin films elaborated by atomic layer deposition
D Thomas, E Puyoo, M Le Berre, L Militaru… - …, 2017 - iopscience.iop.org
Pt nanoparticles in a Al 2 O 3 dielectric matrix thin films are elaborated by means of atomic
layer deposition. These nanostructured thin films are integrated in vertical and planar test …
layer deposition. These nanostructured thin films are integrated in vertical and planar test …