The high-quality, high-efficiency micro-hole drilling of structural ceramics to improve the
thermal conductivity of hot-end parts or achieve high-density electronic packaging is still a …

Structural ceramics are becoming widely popular in numerous fields because of high
mechanical and physical properties. It is of great difficulty for conventional techniques to …

This study adopted femtosecond laser with a wavelength of 515 nm to drill high-aspect-ratio
micro through holes on a 500-μm thickness single-crystal SI-type 4H-SiC wafer. Firstly …

Pressure sensors that can work over 500℃ are widely needed in aerospace and
petrochemical fields, while silicon based high temperature pressure sensors are difficult to …

This paper presents an exploration on the material removal of SiC at atomic and close-to-
atomic scale under ambient condition by nanosecond ultraviolet laser. The corresponding …

The excellent characteristics of transparent hard materials such as high hardness, high
transparency, corrosion resistance, and high temperature resistance enable their …

A method for ultrafast etching of single crystal 6H-SiC by integrating a femtosecond laser
modification and inductively coupled plasma (ICP) etching is proposed in this paper. The …

Micromachining silicon carbide (SiC) is challenging due to its durable nature. However,
plasma and laser etch processes have been utilized to realize deep and high aspect ratio …

Ceramic with outstanding mechanical and physical properties has been widely used in
various engineering applications. The low processing efficiency and quality of the …

Abstract Silicon nitride (Si 3 N 4) has excellent thermostability, low density, corrosion
resistance, high mechanical strength. Therefore, it is widely used in the aerospace and …