This topical review discusses recent development and trends on scanning micromirrors for
biomedical applications. This also includes a biomedical micro robot for precise …

Nanopositioners are high-precision mechatronic devices that are capable of generating
mechanical motion with nanometer or sub-nanometer resolution. With this motion typically …

A novel parallel-kinematic flexure mechanism that provides highly decoupled motions along
the three translational directions (X, Y, and Z) and high stiffness along the three rotational …

A repulsive-force out-of-plane large stroke translation micro electrostatic actuator is
presented. A model of the actuator is presented and is used to relate the applied voltage to …

The atomic force microscope (AFM) is an invaluable scientific tool; however, its conventional
implementation as a relatively costly macroscale system is a barrier to its more widespread …

In this paper a design is presented for a precision MEMS-based six degrees-of-freedom
(DOFs) manipulator. The purpose of the manipulator is to position a small sample (10μm× …

The development of manufacturing tools and processes capable of precisely positioning and
manipulating nanoscale components and materials is still in its embryonic stage …

This paper presents the modelling and design analysis of V-and Z-shaped electrothermal
microactuators. First, a comprehensive but concise closed-form multiphysical analytical …

Dielectric metasurfaces have opened promising possibilities to enable a versatile platform in
the miniaturization of optical elements at visible and infrared frequencies. Due to high …

We describe a novel high-bandwidth two degree of freedom microelectromechanical system
nanopositioner. On-chip piezoresistive sensors and four electrostatic actuators are …