In this paper, the basic concepts of the equivalent model, vibration modes, and conduction
mechanisms of MEMS resonators are described. By reviewing the existing representative …

Compared to conventional sensors, resonant-based sensors output frequency signals
instead of voltage signals and therefore have greater advantages in terms of accuracy, noise …

This letter reports temperature compensated single crystal silicon (SCS) bulk-mode
capacitive microelectromechanical system (MEMS) resonators with high temperature …

This paper presents a capacitive bulk mode resonator operating in Lamé mode, where the
motional resistance and temperature stability are enhanced by implementing a set of …

This paper presents mechanically coupled single-crystal silicon (SCS)
microelectromechanical system (MEMS) resonators for temperature coefficient of frequency …

To improve the load identification capability and high overloading-resistibility of the silicon-
based micro-electromechanical system (MEMS) setback safety device, a MEMS setback …

A high-Q and low-motional impedance (R m) resonator is achieved by mechanically
coupling a low-impedance piezoelectric length extensional-mode resonator with two high-Q …

As the use of MEMS becomes more prolific in air, space, defense, and power applications,
they will be exposed to more extreme radiation environments. This dissertation explores the …

This letter presents a dual-mode piezoelectric microelectromechanical system (MEMS)
resonator with an in-chip micro-oven for resonator temperature control. The piezoelectric …

The importance of micromachined resonators continues to grow as they become
increasingly prevalent in a wide range of applications, from wearable devices to more …