The issue of stress in thin films and functional coatings is a persistent problem in materials
science and technology that has congregated many efforts, both from experimental and …

Written by a world-renowned authority of optical coatings, Thin-Film Optical Filters, Fourth
Edition presents an introduction to thin-film optical filters for both manufacturers and users …

Three-dimensional chiral plasmonic metasurfaces were demonstrated to offer enormous
potential for ultrathin circular polarizers and applications in chiral sensing. However, the …

Abstract Silicon nitride (Si3N4) photonic integrated circuits (PICs) are of great interest due to
their extremely low propagation loss and higher integration capabilities. The number of …

Antireflection (AR) coatings are indispensable in numerous optical applications and are
increasingly demanded on highly curved optical components. In this work, optical thin films …

HfO_2 has promising applications in semiconductors and optics due to its high dielectric
constant and high refractive index. In this work, HfO_2 thin films were deposited by plasma …

A novel broadband antireflective coating with ultra-low residual reflectance for light
incidence angles from 0° up to 60° is presented. The system consists of an interference …

In this study, less contaminated and porous SiO2 films were grown via ALD at room
temperature. In addition to the well-known catalytic effect of ammonia, the self-limitation of …

The structural, optical, and mechanical properties of TiO 2 nanolaminate films grown by
plasma-enhanced atomic layer deposition are discussed. Several TiO 2/Al 2 O 3 and TiO …

Structural, optical, and mechanical properties of Al_2O_3, SiO_2, and HfO_2 materials
prepared by plasma-enhanced atomic layer deposition (PEALD) were investigated …