Learning control for motion coordination in wafer scanners: toward gain adaptation
F Song, Y Liu, D Shen, L Li, J Tan - IEEE Transactions on …, 2022 - ieeexplore.ieee.org
Accurate pattern transfer in wafer scanners necessitates the wafer stage and the reticle
stage executing a coordinated motion with the synchronization error in terms of nanometers …
stage executing a coordinated motion with the synchronization error in terms of nanometers …
Global integral sliding-mode control with improved nonlinear extended state observer for rotary tracking of a hydraulic roofbolter
Z Zhang, Y Guo, D Gong, J Liu - IEEE/ASME Transactions on …, 2022 - ieeexplore.ieee.org
To effectively control the drilling of a hydraulic roofbolter is of importance because
inappropriate rotary speed may lead to the collapse of roof in a roadway. Two difficulties …
inappropriate rotary speed may lead to the collapse of roof in a roadway. Two difficulties …
Composite adaptive synchronous control of dual-drive gantry stage with load movement
In gantry systems, load usually moves according to different production tasks. The
continuous change of the beam centroid position is a non-negligible factor for achieving …
continuous change of the beam centroid position is a non-negligible factor for achieving …
4-dof visual servoing of a robotic flexible endoscope with a predefined-time convergent and noise-immune adaptive neural network
Endoscopes provide views inside the patient's body during minimally invasive surgery.
Although various robotic endoscopes have been developed to reduce surgeons' workload in …
Although various robotic endoscopes have been developed to reduce surgeons' workload in …
RBF neural network-based adaptive robust synchronization control of dual drive gantry stage with rotational coupling dynamics
P Shi, W Sun, X Yang - IEEE Transactions on Automation …, 2022 - ieeexplore.ieee.org
As a typical mechatronics system, dual drive gantry stage has been widely used in high-end
intelligent equipment. In this paper, an adaptive robust synchronization control scheme …
intelligent equipment. In this paper, an adaptive robust synchronization control scheme …
Iterative learning based neural network sliding mode control for repetitive tasks: With application to a PMLSM with uncertainties and external disturbances
The uncertainties, force ripple, friction and other external disturbances in permanent magnet
linear synchronous motors (PMLSMs) pose great challenges to the design of advanced …
linear synchronous motors (PMLSMs) pose great challenges to the design of advanced …
Fuzzy-based controller synthesis and optimization for underactuated mechanical systems with nonholonomic servo constraints
This article investigates the trajectory tracking problem of underactuated mechanical
systems (UMSs) with companion nonholonomic servo constraints and uncertainties. For …
systems (UMSs) with companion nonholonomic servo constraints and uncertainties. For …
[HTML][HTML] Gain-Scheduled Sliding-Mode-Type Iterative Learning Control Design for Mechanical Systems
Q Yao, H Jahanshahi, S Bekiros, SF Mihalache… - Mathematics, 2022 - mdpi.com
In this paper, a novel gain-scheduled sliding-mode-type (SM-type) iterative learning (IL)
control approach is proposed for the high-precision trajectory tracking of mechanical …
control approach is proposed for the high-precision trajectory tracking of mechanical …
Hybrid active–passive robust control framework of a flexure-joint dual-drive gantry robot for high-precision contouring tasks
For high-precision contouring tasks in a typical Cartesian motion system, multiaxis
cooperation is a long-standing challenging issue. Inevitably, various factors pose substantial …
cooperation is a long-standing challenging issue. Inevitably, various factors pose substantial …
[HTML][HTML] Adaptive nonsingular terminal sliding mode control of robot manipulator based on contour error compensation
Z Dachang, H Pengcheng, D Baolin, Z Puchen - Scientific Reports, 2023 - nature.com
To achieve accurate contour tracking of robotic manipulators with system uncertainties,
external disturbance and actuator faults, a cross-coupling contour adaptive nonsingular …
external disturbance and actuator faults, a cross-coupling contour adaptive nonsingular …