The first publication of its kind in the field, this book describes comprehensively and
systematically radio-frequency (rf) capacitive gas discharges of intermediate and low …

Theoretical predictions are given of the spatiotemporal distribution of charged-particle
densities and electric field in a radio-frequency glow discharge. The model is based on a …

We have measured spatiotemporal structures of excited species by laser spectroscopic
methods in a plasma jet, which was driven by a bipolar impulse voltage pulse train of the …

Using temporally and spatially resolved laser spectroscopy, we have determined the
identities, approximate concentrations, effects on the local field, and kinetics of formation …

Particle-in-cell (PIC) simulations are used to study the structure of radio-frequency (RF) glow
discharges in helium between parallel-plate electrodes. The authors have examined a …

Optical emission actinometry has been used recently as a means for estimating relative
concentrations of radicals in rf plasmas. The technique relies upon normalization of the …

Using Stark-mixed laser-induced fluorescence, space-time–resolved maps of sheath electric
fields in discharges through BCl 3 and Ar are measured as a function of concentration …

We report laser diagnostic studies of capacitively coupled RF discharges containing 0.05-
0.45-percent silane in argon. We probed positions between the plane-parallel electrodes by …

A capacitively coupled, rf glow discharge of silane in argon was studied to determine the
spatial dependence of particle light scattering. Light scattering from a pulsed laser at 500 nm …

Laser‐induced fluorescence has been used to examine the temporal behavior of ground‐
state CF2 and CF radicals in a CF4 plasma etching reactor. We also report the measured …