Static and dynamic analyses of an electrostatic microbeam under repulsive force actuation
are presented. The repulsive force, created through a specific electrode configuration …

In this paper, parametric excitation of a repulsive force electrostatic resonator is studied. A
theoretical model is developed and validated by experimental data. A correspondence of the …

This chapter provides an overview of parametric excitation as it pertains to resonant
micro/nanosystems. The chapter highlights the feasible physical sources of parametric …

Parametric resonances in a repulsive-force MEMS resonator are investigated. The repulsive
force is generated through electrostatic fringe fields that arise from a specific electrode …

MEMS resonators are widely used in many commercial electronic devices. Understanding
their static/dynamic behavior is an integral part of the optimization process, which leads to …

This paper presents a novel gyroscope design of micromachined vibratory gyroscope with
better gain characteristics while retaining the wide bandwidth. This design is based on using …