Fabrication methods for capacitive-micromachined ultra sound transducers (“cMUT”) and
cMUT imaging array systems are provided. cMUT devices fabricated from loW process …

A micro-electro-mechanical transducer (such as a cMUT) having two electrodes separated
by an insulator with an insulation extension is disclosed. The two electrodes define a …

Multiple electrode element capacitive micromachined ultrasonic transducer (“cMUT”)
devices and fabrication methods are provided. A cMUT device generally comprises a top …

(57) ABSTRACT A piezoelectric micromachined ultrasonic transducer com prising a
substrate and a first dielectric film formed on the Substrate. An opening having a sidewall is …

Harmonic capacitive micromachined ultrasonic transducer (“cMUT”) devices and fabrication
methods are provided. In a preferred embodiment, a harmonic cMUT device generally …

Methods are provided for production of pre-collapsed capacitive micro-machined ultrasonic
transducers (cMUTs). Methods disclosed generally include the steps of obtaining a nearly …

A micro-electro-mechanical transducer (such as a cMUT) is disclosed. The transducer has a
base, a spring layer placed over the base, and a mass layer connected to the spring layer …

Provisional application No. 60/705,606, filed on Aug.(57) ABSTRACT 3, 2005. A micro-
electro-mechanical transducer (Such as a cMUT) is Int. Cl disclosed. The transducer has a …

51) Int. C(57) ABSTRACT (51) to: N iMO(2006.01) Some examples include at least one
capacitive micro-electro B4 2/045(200 6,015 mechanical transducer (cMUT). For instance …

(65) Prior Publication Data(Continued) US 2005/0203397 A1 Sep. 15, 2005 Primary
Examiner Thomas MDougherty (74) Attorney, Agent, or Firm Troutman Sanders LLP. Ryan …