Fabrication and characterization of single-crystal 4H-SiC microactuators for MHz frequency operation and determination of Young's modulus

F Zhao, W Du, CF Huang - Microelectronic engineering, 2014 - Elsevier
Silicon carbide (SiC), a wide bandgap semiconductor, is more desirable over conventional
silicon (Si) to satisfy the increasing demands for microelectromechanical system (MEMS) to …

Surface phonon-polariton enhanced optical forces in silicon carbide nanostructures

D Li, NM Lawandy, R Zia - Optics express, 2013 - opg.optica.org
The enhanced optical forces induced by surface phonon-polariton (SPhP) modes are
investigated in different silicon carbide (SiC) nanostructures. Specifically, we calculate …

Thermal-piezoresistive pumping on double SiC layer resonator for effective quality factor tuning

P Guzman, T Dinh, A Qamar, J Lee, XQ Zheng… - Sensors and Actuators A …, 2022 - Elsevier
Active techniques that pump energy into MEMS mechanical resonant devices to improve
their performance have attracted great research attention. Herein, we introduce a new …

Surface roughness effects on the frequency tuning performance of a nanoelectromechanical resonator

HS Yoon, B Park, SC Jun - Nanoscale Research Letters, 2013 - Springer
Electrothermal heating is one of radio frequency tuning method in nanoelectromechanical
resonators with magnetomotive transduction. This study confirmed that the surface …

Wheatstone bridge piezoresistive sensing for bulk-mode micromechanical resonator

G Wu, D Xu, B Xiong, Y Wang - Applied Physics Letters, 2012 - pubs.aip.org
A balanced wheatstone bridge technique for piezoresistive detection in micromechanical
resonators is demonstrated. Two identical beam resonators, which vibrate in the length …

[图书][B] Wide Bandgap Nanowires: Synthesis, Properties, and Applications

TA Pham, T Dinh, NT Nguyen, HP Phan - 2022 - books.google.com
WIDE BANDGAP NANOWIRES Comprehensive resource covering the synthesis, properties,
and applications of wide bandgap nanowires This book presents first-hand knowledge on …

Nonlinearity control of nanoelectromechanical resonators

HS Yoon, WK Kim, JH Cho, JY Kang… - IEEE electron device …, 2012 - ieeexplore.ieee.org
To achieve high performance of nanoelectromechanical resonators in room-temperature
and low-vacuum conditions, the precise control of electrothermal power is critical in not only …

Study of influence of the removal depth of the silicon modification layer on grating structures in reaction-sintered silicon carbide substrate and improvement method

C Shen, X Tan, Q Jiao, W Zhang, T Wang, W Li… - Applied Optics, 2018 - opg.optica.org
The influence of the removal depth of a silicon modification layer on grating structures and
mirrors is studied. The removal depth 6–14 μm is the optimization result for Si-modified …

Mechanical properties changes during electrothermal RF tuning in a nanoelectromechanical resonator

HS Yoon, B Park, JH Cho… - IEEE transactions on …, 2013 - ieeexplore.ieee.org
This paper demonstrates the electrothermal tuning of a nanoelectromechanical resonator
correlated with the mechanical properties of an Al/SiC bilayer beam structure at radio …

A platform for nanomaterial-enhanced gas sensing using magnetomotive MEMS

HA Brausen - 2017 - era.library.ualberta.ca
A Platform for Nanomaterial-Enhanced Gas Sensing using Magnetomotive MEMS Page 1 A
Platform for Nanomaterial-Enhanced Gas Sensing using Magnetomotive MEMS by Henry A …