Fabrication and characterization of single-crystal 4H-SiC microactuators for MHz frequency operation and determination of Young's modulus
Silicon carbide (SiC), a wide bandgap semiconductor, is more desirable over conventional
silicon (Si) to satisfy the increasing demands for microelectromechanical system (MEMS) to …
silicon (Si) to satisfy the increasing demands for microelectromechanical system (MEMS) to …
Surface phonon-polariton enhanced optical forces in silicon carbide nanostructures
The enhanced optical forces induced by surface phonon-polariton (SPhP) modes are
investigated in different silicon carbide (SiC) nanostructures. Specifically, we calculate …
investigated in different silicon carbide (SiC) nanostructures. Specifically, we calculate …
Thermal-piezoresistive pumping on double SiC layer resonator for effective quality factor tuning
Active techniques that pump energy into MEMS mechanical resonant devices to improve
their performance have attracted great research attention. Herein, we introduce a new …
their performance have attracted great research attention. Herein, we introduce a new …
Surface roughness effects on the frequency tuning performance of a nanoelectromechanical resonator
Electrothermal heating is one of radio frequency tuning method in nanoelectromechanical
resonators with magnetomotive transduction. This study confirmed that the surface …
resonators with magnetomotive transduction. This study confirmed that the surface …
Wheatstone bridge piezoresistive sensing for bulk-mode micromechanical resonator
G Wu, D Xu, B Xiong, Y Wang - Applied Physics Letters, 2012 - pubs.aip.org
A balanced wheatstone bridge technique for piezoresistive detection in micromechanical
resonators is demonstrated. Two identical beam resonators, which vibrate in the length …
resonators is demonstrated. Two identical beam resonators, which vibrate in the length …
[图书][B] Wide Bandgap Nanowires: Synthesis, Properties, and Applications
WIDE BANDGAP NANOWIRES Comprehensive resource covering the synthesis, properties,
and applications of wide bandgap nanowires This book presents first-hand knowledge on …
and applications of wide bandgap nanowires This book presents first-hand knowledge on …
Nonlinearity control of nanoelectromechanical resonators
To achieve high performance of nanoelectromechanical resonators in room-temperature
and low-vacuum conditions, the precise control of electrothermal power is critical in not only …
and low-vacuum conditions, the precise control of electrothermal power is critical in not only …
Study of influence of the removal depth of the silicon modification layer on grating structures in reaction-sintered silicon carbide substrate and improvement method
C Shen, X Tan, Q Jiao, W Zhang, T Wang, W Li… - Applied Optics, 2018 - opg.optica.org
The influence of the removal depth of a silicon modification layer on grating structures and
mirrors is studied. The removal depth 6–14 μm is the optimization result for Si-modified …
mirrors is studied. The removal depth 6–14 μm is the optimization result for Si-modified …
Mechanical properties changes during electrothermal RF tuning in a nanoelectromechanical resonator
This paper demonstrates the electrothermal tuning of a nanoelectromechanical resonator
correlated with the mechanical properties of an Al/SiC bilayer beam structure at radio …
correlated with the mechanical properties of an Al/SiC bilayer beam structure at radio …
A platform for nanomaterial-enhanced gas sensing using magnetomotive MEMS
HA Brausen - 2017 - era.library.ualberta.ca
A Platform for Nanomaterial-Enhanced Gas Sensing using Magnetomotive MEMS Page 1 A
Platform for Nanomaterial-Enhanced Gas Sensing using Magnetomotive MEMS by Henry A …
Platform for Nanomaterial-Enhanced Gas Sensing using Magnetomotive MEMS by Henry A …