In this era, electronic devices such as mobile phones, computers, laptops, sensors, and
many more have become a necessity in healthcare, for a pleasant lifestyle, and for carrying …

MEMS inductors are used in a wide range of applications in micro-and nanotechnology,
including RF MEMS, sensors, power electronics, and Bio-MEMS. Fabrication technologies …

In this contribution, we compare the performance of Focused Electron Beam-induced
Deposition (FEBID) and Focused Ion Beam-induced Deposition (FIBID) at room temperature …

Nanotechnology and nanoscience are enabled by nanofabrication. Electron-beam
lithography, which makes 2D patterns down to a few nanometers, is one of the fundamental …

Three-dimensional (3D) nanofabrication techniques are of paramount importance in
nanoscience and nanotechnology because they are prerequisites to realizing complex …

This work was aimed at quantitative determination of the absorbed doses under X-ray
irradiation of cryogenic deposited films, particularly related to the matrix isolation …

E-beam lithography is a powerful tool for generating nanostructures and fabricating
nanodevices with fine features approaching a few nanometers in size. However, alternative …

The emerging ice lithography (IL) nanofabrication technology differs from conventional
electron-beam lithography by working at cryogenic temperatures and using vapor-deposited …

Recent developments in nanoprinting using focused electron beams have created a need to
develop analysis methods for the products of electron-induced fragmentation of different …

The feature size of patterns obtained by electron-beam lithography (EBL) depends critically
on resist properties, beam parameters, development process, and instrument limitations …