Studying the Barrier Quality of ALD Oxide Layers
H Wünscher, I Tobehn-Steinhäuser… - 2021 International …, 2021 - ieeexplore.ieee.org
The usage of an electrical device in an aqueous medium requires a sealing which keeps the
water and the ionic components out of the isolation. Thus, the quality of a passivation does …
water and the ionic components out of the isolation. Thus, the quality of a passivation does …