Titanium dioxide thin films by atomic layer deposition: A review
JP Niemelä, G Marin, M Karppinen - Semiconductor science and …, 2017 - iopscience.iop.org
Within its rich phase diagram titanium dioxide is a truly multifunctional material with a
property palette that has been shown to span from dielectric to transparent-conducting …
property palette that has been shown to span from dielectric to transparent-conducting …
Atomic layer deposition: an enabling technology for the growth of functional nanoscale semiconductors
In this paper, we present the progress in the growth of nanoscale semiconductors grown via
atomic layer deposition (ALD). After the adoption by semiconductor chip industry, ALD …
atomic layer deposition (ALD). After the adoption by semiconductor chip industry, ALD …
[HTML][HTML] The role of plasma in plasma-enhanced atomic layer deposition of crystalline films
The inclusion of plasma in atomic layer deposition processes generally offers the benefit of
substantially reduced growth temperatures and greater flexibility in tailoring the gas-phase …
substantially reduced growth temperatures and greater flexibility in tailoring the gas-phase …
Nanostructured thin films based on TiO2 and/or SiC for use in photoelectrochemical cells: A review of the material characteristics, synthesis and recent applications
In solar energy harvesting research, there is growing interest in the study of
photoelectrochemical (PEC) properties of the following classes of semiconductor materials …
photoelectrochemical (PEC) properties of the following classes of semiconductor materials …
Enhanced Performance of MoS2 Photodetectors by Inserting an ALD‐Processed TiO2 Interlayer
Abstract 2D molybdenum disulfide (MoS2) possesses excellent optoelectronic properties
that make it a promising candidate for use in high‐performance photodetectors. Yet, to meet …
that make it a promising candidate for use in high‐performance photodetectors. Yet, to meet …
Enhanced osteogenic activity of anatase TiO2 film: Surface hydroxyl groups induce conformational changes in fibronectin
L Lv, K Li, Y Xie, Y Cao, X Zheng - Materials Science and Engineering: C, 2017 - Elsevier
In this study, with an attempt to identify the effects of TiO 2 crystalline phase compositions on
the osteogenic properties, the anatase and rutile TiO 2 thin films with similar film thickness …
the osteogenic properties, the anatase and rutile TiO 2 thin films with similar film thickness …
[HTML][HTML] Mechanical and optical properties of as-grown and thermally annealed titanium dioxide from titanium tetrachloride and water by atomic layer deposition
OME Ylivaara, A Langner, X Liu, D Schneider, J Julin… - Thin Solid Films, 2021 - Elsevier
The use of thin-films made by atomic layer deposition (ALD) is increasing in the field of
optical sensing. ALD TiO 2 has been widely characterized for its physical and optical …
optical sensing. ALD TiO 2 has been widely characterized for its physical and optical …
Particular Transport Properties of NiFe2O4 Thin Films at High Temperatures
C Solis, S Somacescu, E Palafox… - The Journal of …, 2014 - ACS Publications
NiFe2O4 (NFO) thin films were deposited on quartz substrates by rf magnetron sputtering,
and the influence of the deposition conditions on their physic-chemical properties was …
and the influence of the deposition conditions on their physic-chemical properties was …
[HTML][HTML] Evolution of surface properties of titanium oxide thin films
Titanium oxide thin films were deposited by rf magnetron sputtering of Ti metallic target in
flow-controlled O 2+ Ar atmosphere. Comprehensive investigations of crystallographic …
flow-controlled O 2+ Ar atmosphere. Comprehensive investigations of crystallographic …
Introducing dusty plasma particle growth of nanospherical titanium dioxide
B Ramkorun, S Jain, A Taba… - Applied Physics …, 2024 - pubs.aip.org
In dusty plasma environments, spontaneous growth of nanoparticles from reactive gases
has been extensively studied for over three decades, primarily focusing on hydrocarbons …
has been extensively studied for over three decades, primarily focusing on hydrocarbons …