Titanium dioxide thin films by atomic layer deposition: A review

JP Niemelä, G Marin, M Karppinen - Semiconductor science and …, 2017 - iopscience.iop.org
Within its rich phase diagram titanium dioxide is a truly multifunctional material with a
property palette that has been shown to span from dielectric to transparent-conducting …

Atomic layer deposition: an enabling technology for the growth of functional nanoscale semiconductors

N Biyikli, A Haider - Semiconductor Science and Technology, 2017 - iopscience.iop.org
In this paper, we present the progress in the growth of nanoscale semiconductors grown via
atomic layer deposition (ALD). After the adoption by semiconductor chip industry, ALD …

[HTML][HTML] The role of plasma in plasma-enhanced atomic layer deposition of crystalline films

DR Boris, VD Wheeler, N Nepal, SB Qadri… - Journal of Vacuum …, 2020 - pubs.aip.org
The inclusion of plasma in atomic layer deposition processes generally offers the benefit of
substantially reduced growth temperatures and greater flexibility in tailoring the gas-phase …

Nanostructured thin films based on TiO2 and/or SiC for use in photoelectrochemical cells: A review of the material characteristics, synthesis and recent applications

RS Pessoa, MA Fraga, LV Santos, M Massi… - Materials Science in …, 2015 - Elsevier
In solar energy harvesting research, there is growing interest in the study of
photoelectrochemical (PEC) properties of the following classes of semiconductor materials …

Enhanced Performance of MoS2 Photodetectors by Inserting an ALD‐Processed TiO2 Interlayer

Y Pak, W Park, S Mitra, AA Sasikala Devi… - Small, 2018 - Wiley Online Library
Abstract 2D molybdenum disulfide (MoS2) possesses excellent optoelectronic properties
that make it a promising candidate for use in high‐performance photodetectors. Yet, to meet …

Enhanced osteogenic activity of anatase TiO2 film: Surface hydroxyl groups induce conformational changes in fibronectin

L Lv, K Li, Y Xie, Y Cao, X Zheng - Materials Science and Engineering: C, 2017 - Elsevier
In this study, with an attempt to identify the effects of TiO 2 crystalline phase compositions on
the osteogenic properties, the anatase and rutile TiO 2 thin films with similar film thickness …

[HTML][HTML] Mechanical and optical properties of as-grown and thermally annealed titanium dioxide from titanium tetrachloride and water by atomic layer deposition

OME Ylivaara, A Langner, X Liu, D Schneider, J Julin… - Thin Solid Films, 2021 - Elsevier
The use of thin-films made by atomic layer deposition (ALD) is increasing in the field of
optical sensing. ALD TiO 2 has been widely characterized for its physical and optical …

Particular Transport Properties of NiFe2O4 Thin Films at High Temperatures

C Solis, S Somacescu, E Palafox… - The Journal of …, 2014 - ACS Publications
NiFe2O4 (NFO) thin films were deposited on quartz substrates by rf magnetron sputtering,
and the influence of the deposition conditions on their physic-chemical properties was …

[HTML][HTML] Evolution of surface properties of titanium oxide thin films

K Płacheta, A Kot, J Banas-Gac, M Zając, M Sikora… - Applied Surface …, 2023 - Elsevier
Titanium oxide thin films were deposited by rf magnetron sputtering of Ti metallic target in
flow-controlled O 2+ Ar atmosphere. Comprehensive investigations of crystallographic …

Introducing dusty plasma particle growth of nanospherical titanium dioxide

B Ramkorun, S Jain, A Taba… - Applied Physics …, 2024 - pubs.aip.org
In dusty plasma environments, spontaneous growth of nanoparticles from reactive gases
has been extensively studied for over three decades, primarily focusing on hydrocarbons …