With the continuous development of manufacturing technology of micro/nano devices based
on GaN, focused gallium ion beam has become a momentous method for machining …

The synergetic effects of process parameters on hydrogenated amorphous carbon (aC: H)
films properties were quantitatively analyzed in plasma-enhanced chemical vapor …

In this paper, advanced particle swarm optimization Algorithm (APSO) with improved velocity
updated strategy is presented. The algorithm incorporates an improved velocity update …

An atomisitic etching model is combined with a continuum concentration solver in order to
realistically simulate various effects during Deep Reactive Ion Etching (DRIE or the Bosch …

Abstract Variable-height, out-of-plane, convoluted microneedle arrays with high aspect ratio,
tapered shafts, sharp tips, and smooth surfaces are required for applications where the …

A cellular automaton model, Morphozoic, is presented. Morphozoic may be used to
investigate the computational power of morphogenetic fields to foster the development of …

Silicon microcavity resonators are an important component in modern photonics. In order to
optimize their performance, it is fundamental to control their final shape, in particular with …

Based on the previous studies of the etch rate of crystalline silicon in alkaline etchants, we
stress the fact that the etch rates can noticeably differ between different research groups …

A new experiment-based method is presented to efficiently and accurately obtain the
resulting outline of micro-structures from focused ion beam (FIB) milling and to guide the …

为了对激光测量系统的测量误差3 维空间分布进行有效评估, 以特定点测量或仿真的大量位置
数据为基础, 采用孤立森林算法对点云进行了异常数据筛除. 基于误差椭球理论 …