MTJ structure and integration scheme

X Li, SH Kang, MM Nowak - US Patent 8,866,242, 2014 - Google Patents
A memory device may comprise a magnetic tunnel junction (MTJ) stack, a bottom electrode
(BE) layer, and a contact layer. The MTJ stack may include a free layer, a barrier, and a …

Perpendicular magnetic tunnel junction structure

X Li - US Patent 9,385,308, 2016 - Google Patents
In a particular illustrative embodiment, a method of fabricating a semiconductor device is
disclosed that includes forming a metal layer over a device substrate, forming a via in …

Manufacturing techniques and corresponding devices for magnetic tunnel junction devices

HC Wang, TW Chiang, YOU Wen-Chun - US Patent 9,666,790, 2017 - Google Patents
Some embodiments relate to a magnetoresistive random access memory (MRAM) cell. The
cell includes a bottom electrode having a central bottom electrode portion Sur rounded by a …

Memory device and method of fabricating the same

GH Baek, I Kim, J Kim, P Jongchul, JI Oh - US Patent 9,608,040, 2017 - Google Patents
BACKGROUND Example embodiments of the inventive concepts relate to memory devices
and/or methods of fabricating the same, and in particular, to memory devices including a …

Semiconductor device

K Suh, B Bae, G Koh, Y Song, K Lee - US Patent 10,164,170, 2018 - Google Patents
A first lower interconnection structure and a second lower interconnection structure are
formed using a first design rule on a first region of a substrate and a second region of the …

MTJ structure and integration scheme

X Li, SH Kang, MM Nowak - US Patent 9,373,782, 2016 - Google Patents
A memory device may comprise a magnetic tunnel junction (MTJ) stack, a bottom electrode
(BE) layer, and a contact layer. The MTJ stack may include a free layer, a barrier, and a …

Back end of line metallization structures

JF Maniscalco, RR Patlolla, CB Peethala… - US Patent …, 2020 - Google Patents
Back end of line (BEOL) metallization structures and methods according to aspects of the
invention generally include forming an interconnect structure including a recessed via …

Integrated-circuit devices including different types of memory cells and methods of forming the same

K Lee, G Koh, KIM HongSoo, LIM Junhee… - US Patent …, 2019 - Google Patents
Integrated circuit devices may include a substrate including a flash memory region and a
variable resistance memory region, a flash memory cell transistor including a cell gate …

Composite spacer layer for magnetoresistive memory

T Tahmasebi, VB Naik, K Lee, CS Seet… - US Patent …, 2019 - Google Patents
A bottom pinned perpendicular magnetic tunnel junction (pMTJ) with high TMR which can
withstand high temperature back-end-of-line (BEOL) processing is disclosed. The pMTJ …

RRAM cell structure with laterally offset BEVA/TEVA

CY Chang, WT Chu, KC Tu, L Yu-Wen… - US Patent …, 2016 - Google Patents
BACKGROUND Non-volatile memories are used in a wide variety of commercial and military
electronic devices and equipment. Embedded flash memory devices are used to store data …