Absolute measurement has always been one of the important development directions of
precision measurement, there are problems that the diffraction and mask working …

For solving the problem of sub-mirror installation and posture monitoring and compensation,
an absolute four-degree-of-freedom (DOF) grating encoder that is able to monitor four …

For expanding the measurement range and improvement of accuracy of multi-axes grating
encoder, a mathematical model of measurement angle and diffraction spot with QPD was …

When designing high-quality optical systems, it is necessary to calculate the real field
distribution of the output beam. In this work, the solution of this problem by the method of the …

Optical sensors of linear displacements with diffraction gratings serving as the measurement
scales are investigated. A method of stabilization of the phase difference of quadrature …

Compared with the four-phase optical structure, the grating encoder based on two-phase
optical structure reduces the number of optical devices used in the system and makes the …

Six-degree-of-freedom (6-DOF) grating encoders have a wide prospect of application.
Aiming at the requirement of real-time detection of 6-DOF grating encoders, this study …

Исследованы оптические датчики линейных перемещений с дифракционными
решётками в качестве измерительных шкал. Предложен метод стабилизации …

An optical position encoder uses two difraction gratings in a measurement scale and
measuring head for generating cosine measurment signals. This report is about special …