Recent development of boron nitride towards electronic applications

N Izyumskaya, DO Demchenko, S Das… - Advanced Electronic …, 2017 - Wiley Online Library
Boron nitride occurs in several polymorphs, among which cubic and hexagonal varieties
have been extensively studied over many years and have found numerous practical …

Nucleation, growth and characterization of cubic boron nitride (cBN) films

WJ Zhang, YM Chong, I Bello… - Journal of Physics D …, 2007 - iopscience.iop.org
Cubic BN (cBN) has a set of extreme properties similar or even superior to diamond. The
advance of science and technology of cBN has however been severely hampered by the …

Recent progress of boron nitrides

X Zhang, J Meng - Ultra-wide bandgap semiconductor materials, 2019 - Elsevier
Boron nitride occurs in several crystalline phases, among which cubic boron nitride (c-BN)
and hexagonal boron nitride (h-BN) are two of the most interesting wide bandgap materials …

Influence of negative dc bias voltage on structural transformation of carbon nitride at 600 C

YK Yap, S Kida, T Aoyama, Y Mori, T Sasaki - Applied physics letters, 1998 - pubs.aip.org
Carbon nitride (CN) thin films were prepared at 600° C by rf plasma pulsed laser deposition.
As we increased the magnitude of the negative dc bias voltage, the CN bonds were …

[图书][B] Low energy ion assisted film growth

A Gonzalez-elipe, JM Sanz, F Yubero - 2003 - books.google.com
This book is an introductory manual for Ion Assisted Deposition (IAD) procedures of thin
films. It is addressed to researchers, post-graduates and even engineers with little or no …

Cubic boron nitride films for industrial applications

I Bello, YM Chong, KM Leung, CY Chan, KL Ma… - Diamond and related …, 2005 - Elsevier
The effects of kinetic energy, chemical nature of substrates and temperature on the synthesis
of cBN films are explored to obtain cBN films with industrial quality. Carbon including …

Deposition of thick cubic boron nitride films: The route to practical applications

I Bello, CY Chan, WJ Zhang, YM Chong… - Diamond and related …, 2005 - Elsevier
Physical and chemical vapor deposition approaches of growing thick cubic boron nitride
(cBN) films needed for practical applications are reviewed. The interfacial soft …

The introducing of fluorine into the deposition of BN: a successful method to obtain high-quality, thick cBN films with low residual stress

S Matsumoto, WJ Zhang - Diamond and related materials, 2001 - Elsevier
Cubic boron nitride films were synthesized on silicon substrates by DC-bias-assisted DC jet
chemical vapor deposition in an Ar–N2–BF3–H2 system. By this method, the deposition of …

Recent advances in cubic boron nitride deposition

WJ Zhang, I Bello, Y Lifshitz, ST Lee - MRS bulletin, 2003 - cambridge.org
This article reviews recent progress in the deposition of thick, adherent, cubic boron nitride
(c-BN) films. Most of the previous work applied ion-assisted physical vapor deposition …

Thick and adherent cubic boron nitride films grown on diamond interlayers by fluorine-assisted chemical vapor deposition

WJ Zhang, I Bello, Y Lifshitz, KM Chan, Y Wu… - Applied physics …, 2004 - pubs.aip.org
Using plasma-enhanced chemical vapor deposition (PECVD) based on fluorine chemistry,
the limitations hindering the practical use of cubic boron nitride (cBN) films in mechanical …