Cluster tool substrate throughput optimization

L Volfovski, T Ishikawa - US Patent 7,699,021, 2010 - Google Patents
Embodiments generally provide an apparatus and method for processing substrates using a
multi-chamber processing system (eg, a cluster tool) that has an increased system …

Cluster tool architecture for processing a substrate

T Ishikawa, RJ Roberts, HR Armer, L Volfovski… - US Patent …, 2008 - Google Patents
1927, 677 2,578,220 3,193,080 3,206,041 3.279, 625 3,351,219 3,402,835 3,428,195
3,610, 159 3,669,206 3,750,804 3,782.564 3,796,327 3,876,085 4,027,246 4,197,000 …

Method and apparatus for controlling uplink power in wireless communication system

SH Ryoo, JS Jung, HJ Kang, JH Kwun… - US Patent 9,603,098, 2017 - Google Patents
2014-05-02 Assigned to SAMSUNG ELECTRONICS CO., LTD. reassignment SAMSUNG
ELECTRONICS CO., LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT …

D2D signal transmission method and user equipment

H Kim, H Seo - US Patent 10,251,167, 2019 - Google Patents
The present invention provides a method whereby user equipment located outside network
coverage or in partial network coverage performs device-to-device (D2D) com munication …

Cartesian robot cluster tool architecture

M Rice, J Hudgens, C Carlson, WT Weaver… - US Patent …, 2010 - Google Patents
Related US Application Data retained in the processing racks so tha a E. processing (63)
Continuation-in-part of application No. 1 1/112,281, sequence can be performed on the …

Cartesian cluster tool configuration for lithography type processes

EA Englhardt, MR Rice, JC Hudgens… - US Patent …, 2010 - Google Patents
The present invention generally provides an apparatus and method for processing
substrates using a multi-chamber processing system (eg, a cluster tool) that is easily …

Techniques for enabling asynchronous communications using unlicensed radio frequency spectrum

H Xu, W Chen, N Bhushan, P Gaal… - US Patent App. 14 …, 2015 - Google Patents
(71) Applicant: QUALCOMMINCORPORATED, San Publication Classification Diego, CA
(US)(51) Int. Cl.(72) Inventors: Hao XU, San Diego, CA (US); Wanshi H04756/00(2006.01) …

Laser light source apparatus

K Kumano - US Patent 7,965,747, 2011 - Google Patents
A laser light source apparatus includes a laser light source; a heat exchanger that includes a
plurality of cooling fins and that cools the laser light source; a driving circuit that drives the …

Method for direct device-to-device communication of terminal in idle mode using similar random access procedures, and device therefor

H Kim, H Seo - US Patent 10,004,064, 2018 - Google Patents
The present document discloses a method for transmitting/receiving signals using direct
device-to-device (D2D) communication by using similar random access procedures in a …

Cluster tool architecture for processing a substrate

T Ishikawa, RJ Roberts, HR Armer, L Volfovski… - US Patent …, 2011 - Google Patents
1927, 677 2,578,220 3,193,080 3,206,041 3.279, 625 3,351,219 3,402,835 3,428,195
3,610, 159 3,669,206 3,750,804 3,782.564 3,796,327 3,876,085 4,027,246 4,197,000 …