Features of structure and mechanical properties LiNbO3

AV Sosunov, AB Volyntsev, KB Tsiberkin, VA Yuriev… - …, 2017 - Taylor & Francis
This paper reviews the features of the structure, composition and mechanical properties of
the subsurface layer of pure lithium niobate. Depth of this layer ranges up to 20 μm, and it's …

Research of abrasive embedment-free lapping on soft-brittle lithium niobate wafer

N Zhu, F Zheng, Y Zhu, S Xu, D Zuo - The International Journal of …, 2016 - Springer
The embedment of abrasives is a large trouble when lapping soft and brittle work-pieces by
loose abrasive lapping, which greatly affects the surface quality of the lapped work-piece. A …

Deformation and stress at pop-in of lithium niobate induced by nanoindentation

Z Zhang, S Yang, C Xu, B Wang, N Duan - Scripta Materialia, 2014 - Elsevier
The hardness of X-, Y-and Z-cut lithium niobate (LiNbO 3 or LN) is 12.8, 9.1 and 10.6 GPa,
respectively. The pop-in phenomenon was observed for all loading experimental data of …

Influence of acid slurries on surface quality of LBO crystal in fixed abrasive CMP

J Li, W Wang, H Wang, L Song, Z Hu, Y Zhu… - The International Journal …, 2015 - Springer
The chemical action, which is generally determined by acid or alkaline regulator in the
slurry, plays an important role in fixed abrasive chemical mechanical polishing (CMP) …

A new chemo-mechanical slurry for close-to-atomic scale polishing of LiNbO3 crystal

J Guo, H Shi, Z Tong, L Li - CIRP Annals, 2023 - Elsevier
A new graphite oxide (GO) nanosheet added KOH-based silica slurry was developed for
close-to-atomic polishing of LiNbO 3. Except synthesis method of the slurry, both polishing …

Nanoindentation and structural studies of MgO-doped congruent LiNbO3 single crystals

MKR Rahman, B Riscob, B Singh, R Bhatt… - Materials Chemistry and …, 2021 - Elsevier
The mechanical properties of undoped and 2.0, 4.0 and 6.0 mol% Mg-doped LN single
crystals, grown by the Czochralski technique, have been investigated using nanoindentation …

Effect of the structure and mechanical properties of the near-surface layer of lithium niobate single crystals on the manufacture of integrated optic circuits

AV Sosunov, RS Ponomarev, VA Yur'ev… - … instrumentation and data …, 2017 - Springer
This paper shows that the near-surface layer of a lithium niobate single layer 15 μ m in depth
is essentially different from the rest of the volume of the material from the standpoint of …

Experimental study on chemical mechanical polishing of chalcogenide glasses

D Xue, P Wang, L Jiao, W Li, Y Ji - Applied optics, 2019 - opg.optica.org
Chalcogenide glasses (Ge_10As_40Se_50) are one of the core components of the
athermalized infrared optical system. Because of material properties, its processability is …

[图书][B] Lithium niobate nanophotonics

Y Cheng - 2021 - taylorfrancis.com
Photonic integrated circuit (PIC) technology holds great potential for breaking through the
bottlenecks in current photonic and optoelectronic networks. Recently, a revolution has been …

Micromachining lithium niobate for rapid prototyping of resonant biosensors

ZYA Al-Shibaany, J Hedley, D Huo… - IOP Conference Series …, 2014 - iopscience.iop.org
Lithium niobate material is widely used in MEMS application due to its piezoelectric
properties. This paper presents the micromachining process of lithium niobate to rapid …