The gas temperature in non-equilibrium plasmas is often obtained from the plasma-induced
emission by measuring the rotational temperature of a diatomic molecule in its excited state …

Laser-induced fluorescence (LIF) techniques currently used as an optical diagnostic to study
and characterize non-thermal equilibrium plasmas are reviewed. The general mechanisms …

Written by a team of pioneering scientists from around the world, Low Temperature Plasma
Technology: Methods and Applications brings together recent technological advances and …

This volume describes the increasing role of in situ optical diagnostics in thin film processing
for applications ranging from fundamental science studies to process development to control …

Particles in glow discharges are charged negatively and are therefore often suspended
electrostatically since the plasma potential is usually more positive than the potential of …

Plasma processing is one of the key technologies worldwide, especially using nonthermal,
low-temperature plasmas. Recently, the situation is characterized by the fast-growing …

We report measurements of the bulk, neutral gas temperature in a chlorine transformer-
coupled plasma. A trace amount (2%–5%) of N 2 was added to the discharge and the …

The utilization of silicon-based materials for thermoelectrics is studied with respect to the
synthesis and processing of doped silicon nanoparticles from gas phase plasma synthesis. It …

Optical emission spectroscopy measurements were performed with added trace probe
gases in an atmospheric pressure direct current helium microplasma. Spatially resolved …

In this article, we give an overview about the chemical and physical processes that play a
role in etching at lower wafer temperatures. Conventionally, plasma etching processes rely …